Reduction of intrinsic stress in cubic boron nitride films

Thin Solid Films

Volumn 341, Issue 1, 1999, Pages 238-245

  Ullmann, J ^a   Kellock, A J ^a   Baglin, J E E ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; COMPRESSIVE STRESS; CUBIC BORON NITRIDE; DEPOSITION; ELECTRON ENERGY LEVELS; FILM PREPARATION; ION BOMBARDMENT; ION IMPLANTATION; IONS; TEMPERATURE; THERMAL STRESS;

INTRINSIC STRESS; STRESS REDUCTION;

THIN FILMS;

EID: 0032674370     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01766-0     Document Type: Article

References (50)

1. Holleck H. J. Vac. Sci. Technol. A. 4:1986;2661.
2. Vel L., Demazeau G., Etourneau J. Mater. Sci. Eng. B. 10:1991;149.
3. R.C. DeVries, GE CRD Report No. 72 CRD 178, 1972.
4. Wendorf R.H. Jr. J. Chem. Phys. 36:1962;1990.
5. Mishima O. Mater. Sci. Forum. 54/55:1991;313.
6. Kester D.J., Ailey A.S., Lichtenwalner D.J., Davis R.F. J. Vac. Sci. Technol. A12:1994;3074.
7. J. Ullmann, D. Heyden, G. Schwarz, K. Baba, G. Wolf, Surf. Coat. Technol. (1998) in press.
8. Hahn J., Friedrich M., Pintaske R., Schaller M., Kahl N., Zahn D.R.T., Richter F. Diamond Relat. Mater. 5:1996;1103.
9. Mieno M., Yoshida T. Jpn. J. Appl. Phys. L. 29:1990;1175.
10. Hofsass H., Ronninu C., Griesmeier U. Nucl. Instrum. Methods B. 110:1995;153.
11. Inagawa K., Watanabe K., Ohsone H., Saitoh K., Itoh A. J. Vac. Sci. Technol. A. 5:1987;2696.
12. Mirkarimi P.B., McCarty K.F., Medlin D.L., et al. J. Mater. Res. 9:1994;2925.
13. Kuhr M., Reinke S., Kulisch W. Diamond Relat. Mater. 4:1995;375.
14. Dworschak W., Jung K., Ehrhardt H. Diamond Relat. Mater. 3:1994;337.
15. Okamoto M., Yokoyama H., Osaka Y. Jpn. J. Appl. Phys. 29:1990;930.
16. P.B. Mirkarimi, D.L. Medlin, K.F. McCarty, D.C. Dibble, W.M. Clift, J.A. Knapp, J.C. Barbour, J. Appl. Phys., submitted.
17. Richter F., Krannich G., Hahn J., Pintaske R., Friedrich M., Schmidbauer S., Zahn D.R.T. Surf. Coat Technol. 90:1997;178.
18. Kestner D.J., Ailey K.S., Davis R.F., More K.L. J. Mater. Res. 8:1993;1213.
19. McKenzie D.R., McFall W.D., Sainty W.G., Davis C.A., Collins R.E. Diamond Relat. Mater. 2:1993;970.
20. Davis C.A. Thin Solid Films. 226:1993;30.
21. Stoney G.G. Proc. R. Soc. London Ser. A. 82:1909;172.
22. Brenner A., Senderoft S. J. Res. Nat. Bureau Standards. 42:1949;105.
23. J.D. Finegan, R.W. Hoffman, AEC Techn. Rep. 15, Case Western Reserve University, Ohio, 1961.
24. Sanjurjo J.R., Lopez-Cruz E., Vogl P., Cardona M. Phys. Rev. B. 28:1983;4579.
25. Murakawa M., Watanabe S., Miyake S. Mater. Sci. Eng. A. 140:1991;753.
26. Kohzuki H., Okuna Y., Motoyama M. Diamond Films Technol. 5:1995;95.
27. Setsuhara Y., Suzuki T., Tanaka Y. Nucl. Instrum. Methods B. 127/128:1997;851.
28. Kumagai M., Suzuki M., Suzuki T., et al. Nucl. Instrum. Methods B. 127/128:1997;977.
29. Murakawa M., Watanabe S., Miyake S. Diamond Films Technol. 5:1995;353.
30. Nishiyama S., Kuratani N., Ebe A., Ogata K. Nucl. Instrum. Methods B. 80/81:1993;148.
31. K.L. Chopra, Thin Film Phenomena, McGraw-Hill, New York, 1969.
32. Reinke S., Kuhr M., Kulisch W. Diamond Relat. Mater. 5:1996;508.
33. Hahn J., Richter F., Pintaske R., Roder M., Schneider E. Th. Wetzel. Surf. Coat Technol. 92:1997;129.
34. Kidner S., Taylor II C.A., Clarke R. Appl. Phys. Lett. 64:1994;1859.
35. Ikeda T., Satou T., Satoh H. Surf. Coat. Technol. 50:1991;33.
36. Wituschek H., Stopka-Ebler H., Wolf G. K. Surf. Coat. Technol. 74/75:1995;729.
37. H. Wituschek, Ph.D. Thesis, University of Heidelberg, 1995 (in German).
38. P.B. Mirkarimi, K.F. McCarty, D.L. Medlin, Mater. Sci. Eng. (1998) in press.
39. P.K. Bachmann, I.M. Buckley-Golder, J.T. Glass, M. Kamo (Eds.), Proc. 5th Eur. Conf. Diamond, Diamond-like and Related Materials, Il Ciocco, Italy, September 25-30, 1994, Elsevier, Lausanne, 1995.
40. Yokoyama H., Okamoto M. Y, Osaka. Jpn. J. Appl. Phys. 30:1991;344.
41. Weber A., Bringmann U., Nikulski R., Klages C.-P. Surf. Coat. Technol. 60:1993;493.
42. Ichiki T., Yoshida T. Appl. Phys. Lett. 64:1994;851.
43. G. Schwarz, Thesis Diploma, Universitat of Heidelberg, 1997 (in German).
44. W. Kulisch, S. Reinke, Diamond Films Technol. (1998) in press.
45. Watanabe S., Miyake S., Murakawa M. Surf. Coat. Technol. 62:1993;558.
46. Trehan R., Lifshitz Y., Rabalais J.W. J. Vac. Sci. Technol. A. 8:1990;4026.
47. Plass M.F., Fukarek W., Mandl S., Moller W. Appl. Phys. Lett. 69:1996;46.
48. P. Widmayer, P. Ziemann, S. Ulrich, H. Ehrhardt, Diamond Relat. Mater., (1997).
49. J. Ullmann, A.J. Kellock, J.E.E. Baglin, J. Appl. Phys., submitted.
50. J.P. Biersack, J.F. Ziegler, TRIM-code, Version 95.06, IBM Research Center, New York, 1995.