The synthesis, characterization, and mechanical properties of thick, ultrahard cubic boron nitride films deposited by ion-assisted sputtering

Journal of Applied Physics

Volumn 82, Issue 4, 1997, Pages 1617-1625

  Mirkarimi, P B ^a,c   Mediin, D L ^a   McCarty, K F ^a   Dibble, D C ^a   Clift, W M ^a   Knapp, J A ^b   Barbour, J C ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CUBIC BORON NITRIDE; ELASTIC MODULI; HARDNESS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SPUTTER DEPOSITION; SUBSTRATES; SYNTHESIS (CHEMICAL);

HARDNESS MEASUREMENTS; HYBRID DEPOSITION TECHNIQUE; ION IRRADIATION; NANOINDENTATION MEASUREMENTS;

THICK FILMS;

EID: 0031211578     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365961     Document Type: Article

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