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Volumn 10, Issue 9-10, 2001, Pages 1881-1885
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Structure analysis of cBN films prepared by DC jet plasma CVD from an Ar-N2-BF3-H2 gas system
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Author keywords
Boron nitride; Confocal Raman; Defects; EELs; Film structure; Grain size; TEM
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CRYSTAL STRUCTURE;
DC MACHINERY;
ELECTRON ENERGY LOSS SPECTROSCOPY;
FILM PREPARATION;
INFRARED SPECTROSCOPY;
JETS;
RAMAN SPECTROSCOPY;
SINGLE CRYSTALS;
STACKING FAULTS;
THICKNESS MEASUREMENT;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION ANALYSIS;
HIGH DENSITY TWINS;
CUBIC BORON NITRIDE;
BORON NITRIDE;
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EID: 0035449210
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(01)00424-1 Document Type: Article |
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Times cited : (37)
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References (18)
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