A nanoindentation study of thick cBN films prepared by chemical vapor deposition

Journal of Crystal Growth

Volumn 247, Issue 3-4, 2003, Pages 438-444

  Chan, C Y ^a   Zhang, W J ^a   Matsumoto, S ^b   Bello, I ^a   Lee, S T ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

A1. Mechanical properties testing; A1. Nanoindentation; A3. Chemical vapor deposition processes; B1. Nitrides; B2. Superhard materials

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALS; CUBIC BORON NITRIDE; FILM PREPARATION; GRAIN BOUNDARIES; HARDNESS; INDENTATION; PHYSICAL VAPOR DEPOSITION; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

NANOINDENTATION;

THICK FILMS;

EID: 0037212073     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(02)02039-0     Document Type: Article

References (18)

1. Murakawa M., Watanabe S. Surf. Coat. Technol. 43/44:1990;128.
2. Wada T., Yamashita N. J. Vac. Sci. Technol. A. 10:1992;515.
3. Nishiyama S., Kuratani N., Ebe A., Ogata K. Nucl. Instrum. Methods B. 80/81:1993;1485.
4. McKenzie D.R. J. Vac. Sci. Technol. B. 11:1993;1928.
5. Dworschak W., Jung K., Ehrhardt H. Diamond Relat. Mater. 3:1994;337.
6. Mirkarimi P.B., Medlin D.L., McCarty K.F., Dibble D.C., Clift W.M., Knapp J.A., Barbour J.C. J. Appl. Phys. 82:1997;1617.
7. Yamada Y., Tsuda O., Yoshida T. Thin Solid Films. 316:1998;35.
8. Matsumoto S., Zhang W.J. Jpn. J. Appl. Phys. 39:2000;L442.
9. Zhang W.J., Matsumoto S., Li Q., Bello I., Lee S.T. Adv. Funct. Mater. 12:2002;250.
10. Tsui T.Y., Pharr G.M. J. Mater. Res. 14:1999;292.
11. S.V. Hainsworth, T.F. Page, in: W.W. Gerberich, H. Gao, J.E. Sundgren, S.P. Baker (Eds.), Materials Research Society Symposium Proceedings, Vol. 436, Materials Research Society, Pittsburgh, 1997, p. 171.
12. Brookes C.A. Field J.E. The Properties of Natural and Synthetic Diamond. 1992;515 Academic Press, London.
13. D'Evelyn M.P., Taniguchi T. Diamond Relat. Mater. 8:1999;1552.
14. Zhang W.J., Matsumoto S. Phy. Rev. B. 63:2001;73201.
15. Veprek S., Argon A.S. Surf. Coat. Technol. 146/147:2001;175.
16. Martíner E., Andújar J.L., Polo M.C., Esteve J., Robertson J., Milne W.I. Diamond Relat. Mater. 10:2001;145.
17. Mirkarimi P.B., McCarty K.F., Dedlin D.L. Mater. Sci. Eng. R21:1997;47.
18. Sánchez J.M., El-Mansy S., Sun B., Scherban T., Fang N., Pantuso D., Ford W., Elizalde M.R., Martínez-Esnaola J.M., Martín-Meizoso A., Gil-Sevillano J., Fuentes M., Maiz J. Acta Mater. 47:1999;4405.