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Diamond and Related Materials

Volumn 5, Issue 3-5, 1996, Pages 548-551

Knock-on subplantation-induced formation of nanocrystalline c-BN with r.f. magnetron sputtering and r.f. argon ion plating

(4) Ulrich, S a Schwan, J a Donner, W b Ehrhardt, H a

a Rheinland Pfälzische Technische Universität Kaiserslautern Landau (Germany)

b UNIVERSITY OF WUPPERTAL (Germany)

Author keywords

Boron nitride; Magnetron sputtering; Subplantation; Thin films

Indexed keywords

EID: 0001249638 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/0925-9635(96)80077-x Document Type: Article

Times cited : (41)

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