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Diamond and Related Materials

Volumn 6, Issue 5-7, 1997, Pages 621-625

Phase stability and stress relaxation effects of cubic boron nitride thin films under 350 keV ion irradiation

(4) Widmayer, P a Ziemann, P a Ulrich, S b Ehrhardt, H b

a UNIVERSITY OF ULM (Germany)

b Rheinland Pfälzische Technische Universität Kaiserslautern Landau (Germany)

Author keywords

Cubic boron nitride; Ion bombardment; Stress

Indexed keywords

EID: 0001627483 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/s0925-9635(96)00616-4 Document Type: Article

Times cited : (62)

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