On the mechanisms of cubic boron nitride film growth

Diamond and Related Materials

Volumn 13, Issue 4-8, 2004, Pages 1103-1110

  Hofsass H ^a   Eyhusen, S ^a   Ronning, C ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

Chemical vapor deposition; Cubic boron nitride; Implantation; Physical vapor deposition

Indexed keywords

DIAMONDS; FILM GROWTH; HIGH TEMPERATURE OPERATIONS; ION BEAM ASSISTED DEPOSITION; PHYSICAL VAPOR DEPOSITION; SURFACE CHEMISTRY;

ALLOTROPES; GROWTH TEMPERATURES; ION ENERGIES; SUBPLANTATION;

CUBIC BORON NITRIDE;

BORON NITRIDE;

EID: 2442560204     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.01.021     Document Type: Article

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