Preparation of cubic boron nitride films by radio frequency magnetron sputtering and radio frequency ion plating

Applied Physics Letters

Volumn 68, Issue 7, 1996, Pages 909-911

  Ulrich, S ^a   Scherer, J ^a   Schwan, J ^a   Barzen, I ^a   Jung, K ^a   Scheib, M ^a   Ehrhardt, H ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000284668     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116227     Document Type: Article

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