Thick and adherent cubic boron nitride films grown on diamond interlayers by fluorine-assisted chemical vapor deposition

Applied Physics Letters

Volumn 85, Issue 8, 2004, Pages 1344-1346

  Zhang, W J ^a   Bello, I ^a   Lifshitz, Y ^a   Chan, K M ^a   Wu, Y ^a   Chan, C Y ^a   Meng, X M ^a   Lee, S T ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; CRYSTAL GROWTH; CRYSTAL LATTICES; DIAMONDS; ELECTRIC POTENTIAL; FLUORINE; LATTICE CONSTANTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA ETCHING; SUBSTRATES; THICK FILMS;

BIAS VOLTAGE; DIAMOND INTERLAYERS; TRIBIOLOGY; TURBOSTRATIC BORON NITRIDE;

CUBIC BORON NITRIDE;

EID: 4544234444     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1784545     Document Type: Article

References (13)

1. W. J. Zhang, I. Bello, Y. Lifshitz, and S. T. Lee, MRS Bull. 28, 184 (2003).
2. P. B. Mirkarimi, K. F. McCarty, and D. L. Medlin, Mater. Sci. Eng., R. 21, 47 (1997).
3. D. Litvinov and R. Clarke, Appl. Phys. Lett. 71, 969 (1997).
4. S. Matsumoto and W. J. Zhang, Jpn. J. Appl. Phys., Part 2 39, L442 (2000).
5. W. J. Zhang, C. Y. Chan, K. M. Chan, I. Bello, Y. Lifshitz, and S. T. Lee, Appl. Phys. A: Mater. Sci. Process. 76, 953 (2003).
6. C. Sun, W. J. Zhang, N. Wang, I. Bello, C. S. Lee, and S. T. Lee, J. Appl. Phys. 88, 3354 (2000).
7. W. J. Zhang, I. Bello, Y. Lifshitz, K. M. Chan, Y. Wu, C. Y. Chan, X. M. Meng, and S. T. Lee, Adv. Mater. (in press).
8. W. J. Zhang and S. Matsumoto, Phys. Rev. B 63, 73201 (2001).
9. C. Y. Chan, W. J. Zhang, S. Matsumoto, I. Bello, and S. T. Lee, J. Cryst. Growth 247, 438 (2003).
10. M. P. D'Evelyn and T. Taniguchi, Diamond Relat. Mater. 8, 1522 (1999).
11. Y. Lifshitz, Th. Köhler, Th. Frauenheim, I. Guzmann, A. Hoffman, R. Q. Zhang, X. T. Zhou, and S. T. Lee, Science 297, 1531 (2002).
12. J. Pascallon, V. Stambouli, S. Ilias, D. Bouchier, G. Nouet, F. Silva, and A. Gicquel, Mater. Sci. Eng., B 59, 239 (1999).
13. X. W. Zhang, H.-G. Boyen, N. Deyneka, P. Ziemann, F. Banhart, and M. Schreck, Nat. Mater. 2, 312 (2003).