Low energy ion beam assisted deposition of TiN thin films on silicon

Scripta Materialia

Volumn 42, Issue 6, 2000, Pages 573-579

  Huang, J H ^a,b   Lin, C H ^a   Ma, C H ^a   Chen, Haydn ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DEPOSITION; ION BEAMS; ION BOMBARDMENT; SILICON; SUBSTRATES; THIN FILMS;

ION BEAM ASSISTED DEPOSITION; PREFERRED ORIENTATION;

TITANIUM NITRIDE;

EID: 0033885644     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6462(99)00393-0     Document Type: Article

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