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Journal of Applied Physics

Volumn 86, Issue 4, 1999, Pages 2300-2306

Film texture evolution in plasma treated TiN thin films

(6) Ikeda, S a,c Palleau, J b Torres, J b Chenevier, B a Bourhila, N a Madar, R a

a Grenoble INP Phelma (France)

b ORANGE LABS (France)

c NATIONAL INSTITUTE FOR MATERIALS SCIENCE (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000214899 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.371045 Document Type: Article

Times cited : (32)

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