Microstructure and composition of titanium nitride formed by ion beam enhanced nitrogen sorption of evaporated titanium under argon ion irradiation

Materials Science and Engineering: A

Volumn 253, Issue 1-2, 1998, Pages 234-239

  Ensinger, W ^a   Volz, K ^a  

^a PHILIPPS UNIVERSITY MARBURG   (Germany)

Author keywords

Grain size; Ion beam assisted deposition; Microstructure; Titanium nitride

Indexed keywords

ARGON; COMPOSITION; CRYSTAL MICROSTRUCTURE; CURRENT DENSITY; DEPOSITION; ELECTRON IRRADIATION; EVAPORATION; GRAIN SIZE AND SHAPE; ION IMPLANTATION; NITROGEN; SORPTION; THIN FILMS;

ION BEAM ENHANCED NITROGEN SORPTION; ION CURRENT DENSITIES;

TITANIUM NITRIDE;

EID: 0040712347     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0921-5093(98)00731-x     Document Type: Article

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