Evolution of nanoscale texture in ultrathin TiN films

Applied Physics Letters

Volumn 78, Issue 15, 2001, Pages 2223-2225

  Williamson, M J ^a   Dunn, D N ^a   Hull, R ^a   Kodambaka, S ^b   Petrov, I ^b   Greene, J E ^b  

^a University of Virginia   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035831838     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1360235     Document Type: Article

References (9)

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