Diffraction analysis of nonuniform stresses in surface layers: Application to cracked TiN coatings chemically vapor deposited on Mo

Journal of Materials Research

Volumn 11, Issue 6, 1996, Pages 1440-1454

  Sloof, W G ^a   Kooi, B J ^a   Delhez, R ^a   De Keijser, Th H ^a   Mittemeijer, E J ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; CHEMICAL VAPOR DEPOSITION; COATINGS; COOLING; CRACKS; DIFFRACTION; MATHEMATICAL MODELS; MOLYBDENUM; POROSITY; RESIDUAL STRESSES; SUBSTRATES; SURFACES;

COMPOSITIONAL INHOMOGENEITY; NONUNIFORM STRESSES; STRESS DEPTH PROFILES; THERMAL SHRINK;

TITANIUM NITRIDE;

EID: 0030168369     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.1996.0181     Document Type: Article

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