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Volumn 142-144, Issue , 2001, Pages 125-131
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Ab-initio calculation of elastic constants of TiN
a a |
Author keywords
Elastic constant; Internal stress; Thin film; X Ray diffraction
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Indexed keywords
ELASTIC MODULI;
GRAIN SIZE AND SHAPE;
POLYCRYSTALLINE MATERIALS;
RESIDUAL STRESSES;
SINGLE CRYSTALS;
STRAIN;
STRESS ANALYSIS;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
COHESION ENERGY CURVES;
ELASTIC CONSTANTS;
TITANIUM NITRIDE;
COATING;
DIFFRACTION;
FILM;
TITANIUM NITRIDE;
X-RAY;
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EID: 0035387560
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(01)01221-X Document Type: Article |
Times cited : (41)
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References (19)
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