Roles of chloride ion in microvia filling by copper electrodeposition II. Studies using EPR and galvanostatic measurements

Journal of the Electrochemical Society

Volumn 152, Issue 2, 2005, Pages

  Dow, Wei Ping ^a   Huang, Her Shu ^a   Yen, Ming Yao ^a   Chen, Hsiang Hao ^a  

^a NATIONAL YUNLIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CATALYSIS; ELECTROCHEMISTRY; ENERGY DISPERSIVE SPECTROSCOPY; OPTICAL MICROSCOPY; PARAMAGNETIC RESONANCE; POSITIVE IONS;

CHLORIDE ION; COPPER ELECTRODEPOSITION; MICROVIA FILLING; SYNERGISTIC EFFECT;

ELECTRODEPOSITION;

EID: 14744280386     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1849935     Document Type: Article

References (65)

1. J. J. Kelly and A. C. West, Electrochem. Solid-State Lett., 2, 561 (1999).
2. T. P. Moffat, J. E. Bonevich, W. H. Huber, A. Stanishevsky, D. R. Kelly, G. R. Stafford, and D. Josell, J. Electrochem. Soc., 147, 4924 (2000).
3. P. Taephaisitphongse, Y. Cao, and A. C. West, J. Electrochem. Soc., 148, C492 (2001).
4. T. Kobayashi, J. Kawasaki, K. Mihara, and H. Honma, Electrochim. Acta, 47, 85 (2001).
5. J. Reid, Jpn. J. Appl. Phys., Part I, 40, 2630 (2001).
6. J.-J. Sun, K. Kondo, T. Okamura, S. Oh, M. Tomisaka, H. Yonemura, M. Hoshino, and K. Takahashi, J. Electrochem. Soc., 150, G333 (2003).
7. W.-P. Dow, H.-S. Huang, and Z. Lin, Electrochem. Solid-State Lett., 6, C134 (2003).
8. K. Kondo, N. Yamakawa, Z. Tanaka, and K. Hayashi, J. Electroanal. Chem., 559, 137 (2003).
9. M. Lefebvre, G. Allardyce, M. Seita, H. Tsuchida, M. Kusaka, and S. Hayashi, Circuit World, 29, 9 (2003).
10. K. Kondo, T. Matsumoto, and K. Watanabe, J. Electrochem. Soc., 151, C250 (2004).
11. P. C. Andricacos, C. Uzoh, J. O. Dukovic, J. Horkans, and H. Deligianni, IBM J. Res. Dev., 42, 567 (1998).
12. J. Reid, S. Mayer, E. Broadbent, E. Klawuhn, and K. Ashtiani, Solid State Technol., 43, 86 (2000).
13. A. C. West, J. Electrochem. Soc., 147, 227 (2000).
14. Y. Cao, P. Taephaisitphongse, R. Chalupa, and A. C. West, J. Electrochem. Soc., 148, C466 (2001).
15. T. P. Moffat, D. Wheeler, W. H. Huber, and D. Josell, Electrochem. Solid-State Lett., 4, C26 (2001).
16. A. C. West, S. Mayer, and J. Reid, Electrochem. Solid-State Lett., 4, C50 (2001).
17. T. P. Moffat, D. Wheeler, C. Witt, and D. Josell, Electrochem. Solid-State Lett., 5, C110 (2002).
18. M. Tan and J. N. Harb, J. Electrochem. Soc., 150, C420 (2003).
19. M. Georgiadou, D. Veyret, R. L. Sani, and R. C. Alkire, J. Electrochem. Soc., 148, C54 (2001).
20. S. Soukane, S. Sen, and T. S. Cale, J. Electrochem. Soc., 149, C74 (2002).
21. Y. H. Im, M. O. Bloomfield, S. Sen, and T. S. Cale, Electrochem. Solid-State Lett., 6, C42 (2003).
22. J. J. Kelly and A. C. West, J. Electrochem. Soc., 145, 3472 (1998).
23. J. J. Kelly and A. C. West, J. Electrochem. Soc., 145, 3477 (1998).
24. M. Rang and A. A. Gewirth, J. Electrochem. Soc., 150, C426 (2003).
25. K. Doblhofer, S. Wasle, D. M. Scares, K. G. Weil, and G. Ertl, J. Electrochem. Soc., 150, C657 (2003).
26. Z. V. Feng, X. Li, and A. A. Gewirth, J. Phys. Chem. B, 107, 9415 (2003).
27. T. P. Moffat, D. Wheeler, and D. Josell, J. Electrochem. Soc., 151, C262 (2004).
28. A. Frank and A. J. Bard, J. Electrochem. Soc., 150, C244 (2003).
29. J. J. Kim, S.-K. Kim, and Y. S. Kim, J. Electroanal. Chem., 542, 61 (2003).
30. T. P. Moffat, B. Baker, D. Wheeler, and D. Josell. Electrochem. Solid-State Lett., 6, C59 (2003).
31. M. Yokoi, S. Konishi, and T. Hayashi, Denki Kagaku oyobi Kogyo Butsuri Kagaku, 52, 218 (1984).
32. J. D. Reid and A. P. David, Plat. Surg. Finish., 74, 66 (1987).
33. J. P. Healy, D. Pletcher, and M. Goodenough, J. Electroanal. Chem., 338, 155 (1992).
34. D. Stoychev and C. Tsvetanov, J. Appl. Electrochem. 26, 741 (1996).
35. L. Bonou, M. Eyraud, R. Denoyel, and Y. Massiani, Electrochim. Acta,7, 4139 (2002).
36. N. Zukauskaite and A. Malinauskas, Electrochemistry (Tokyo, Jpn.), 24, 1567 (1989).
37. J. P. Healy, D. Pletcher, and M. Goodenough, J. Electroanal. Chem., 338, 167 (1992).
38. E. E. Farndon, F. C. Walsh, and S. A. Campbell, J. Appl. Electrochem., 25, 574 (1995).
39. Z. Nagy, J. P. Blaudeau, N. C. Hung, L. A. Curtiss, and D. J. Zurawski, J. Electrochem. Soc., 141, L87 (1995).
40. D. M. Scares, S. Waste, K. G. Weil, and K. Doblhofer, J. Electroanal. Chem., 532, 353 (2002).
41. G. G. Láng, M. Ujvári, and G. Horányi, J. Electroanal. Chem., 522, 179 (2002).
42. J. A. Weil, J. R. Bolton, and J. E. Wertz, Electron Papamagnetic Resonance - Elementary Theory and Practical Applications, p. 213. John Wiley ft Sons, Inc., New York (1994).
43. T. C. Franklin, Plat. Surf. Finish., 81, 62 (1994).
44. D. F. Shrive and P. W. Atkins, Inorganic Chemistry, 3rd ed., p. 190, Oxford University Press, Oxford (1999).
45. C. G. Kuehn and S. S. Isied, Prog. Inorg. Chem., 27, 153 (1980).
46. P. J. Blower and J. R. Dilworth, Coord. Chem. Rev., 76, 121 (1987).
47. S. Cobianco, A. Lezzi, and R. Scotti, Reactive Funct. Polym., 43, 7 (2000).
48. W.-P. Dow and H.-S. Huing, J. Electrochem. Soc., 152, C67 (2005).
49. H. P. Lee, K. Nobe. and A. J. Pearlstein, J. Electrochem. Soc., 132.1031 (1985).
50. A. J. Pearlstein, H. P. Lee, and K. Nobe, J. Electrochem. Soc., 132, 2159 (1985).
51. S. Fujiwara, S. Katsumata, and T. Seki, J. Phys. Chem., 71, 115 (1967).
52. B. R. McGarvey, J. Phys. Chem., 71, 51 (1967).
53. J. I. Zink and R. S. Drago, J. Am. Chem. Soc., 94, 4550 (1972).
54. S. K. Chawla, Polyhedron, 18, 1397 (1999).
55. P. R. Bontchev, G. Gochev, B. Evtimova, H. Kadum, and C. Nachev, J. Inorg. Biochem., 46, 23 (1992).
56. Y. Sugiura and Y. Hiraayama, J. Am. Chem. Soc., 99, 1581 (1977).
57. H. Hagenström, M. A. Schneeweiss, and D. M. Kolb, Langmuir, 15, 7802 (1999).
58. M. A. Schneeweiss, H. Hagenstrom, M. J. Esplandiu, and D. M. Kolb, Appl. Phys. A: Mater. Sci. Process., 69, 537 (1999).
59. O. Azzaroni, P. L. Schilardi, and R. C. Salvarezza, Electrochim. Acta, 48, 3107 (2003).
60. M. Petri, D. M. Kolb, U. Memmert, and H. Meyer, Electrochim. Acta, 49, 183 (2003).
61. U. Sakaguchi and A. W. Addison, J. Chem. Soc. Dalton Trans., 1979, 600.
62. E. Guillon,J.Déchamps-Olivier, and J.-P. Barbier, Polyhedron, 17, 3255 (1998).
63. M. F. Ottaviani, G. Retini, M. Cangiotti, F. Mangani, and U. Segre, Spectrochim. Acta, Part A, 58, 1129 (2002).
64. P. Merdy, E. Guillon, M. Aplincourt, J. Dumonceau, and H. Vezin, J. Colloid Interface Sci., 245, 24 (2002).
65. C. D. Bain, E B. Troughton, Y.-T. Tao, J. Evall, G. M. Whitesides, and R. G. Nuzzo, J. Am. Chem. Soc., 111, 321 (1989).