A round robin characterisation of the thickness and composition of thin to ultra-thin AlNO films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 227, Issue 3, 2005, Pages 397-419

  Barradas, N P ^a,b   Added, N ^c   Arnoldbik, W M ^d   Bogdanovic Radovic I ^e   Bohne, W ^f   Cardoso, S ^g   Danner, C ^h   Dytlewski, N ⁱ   Freitas, P P ^g   Jaksic M ^e   Jeynes, C ^j   Krug, C ^k   Lennard, W N ^l   Lindner, S ^f   Linsmeier, Ch ^h   Medunic Z ^e   Pelicon, P ^m   Pezzi, R P ^k   Radtke, C ^k   Rhrich J ^f   Sajavaara, T ⁿ   Salgado, T D M ^k   Stedile, F C ^k   Tabacniks, M H ^k   Vickridge, I ^o   more..

^a INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^b CENTRO DE FÍSICA NUCLEAR DA UNIVERSIDADE DE LISBOA   (Portugal)

^c UNIVERSITY OF SÃO PAULO   (Brazil)

^d UTRECHT UNIVERSITY   (Netherlands)

^e RUDER BO KOVI INSTITUTE   (Croatia)

^f HAHN MEITNER INSTITUT   (Germany)

^g INESC   (Portugal)

^h MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

ⁱ AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

^j UNIVERSITY OF SURREY   (United Kingdom)

^k FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

^l UNIVERSITY OF WESTERN ONTARIO   (Canada)

^m JO EF STEFAN INSTITUTE   (Slovenia)

ⁿ UNIVERSITY OF HELSINKI   (Finland)

^o SORBONNE UNIVERSITÉ   (France)

more..

Author keywords

Ion beam analysis; Oxynitrides; Round robin; Thin films; Tunnel junction barrier

Indexed keywords

ENERGY DISSIPATION; ERROR ANALYSIS; ION BEAMS; MAGNETORESISTANCE; NUCLEAR ENERGY; OXIDATION; QUALITY ASSURANCE; THICKNESS MEASUREMENT; TUNNEL JUNCTIONS;

ION BEAM ANALYSIS (IBA); OXYNITRIDES; ROUND ROBIN CHARACTERIZATION; TUNNEL JUNCTION BARRIERS;

THIN FILMS;

EID: 10144257232     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.08.021     Document Type: Article

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