Depth profiling of ultrathin films using medium energy ion scattering

Current Applied Physics

Volumn 3, Issue 1, 2003, Pages 75-82

  Kim, Joonkoon ^a   Lennard, W N ^b   McNorgan, C P ^b   Hendriks, J ^b   Mitchell, I V ^b   Landheer, D ^c   Gredley, J ^c  

^a Korea Institute of Geosceince and Mineral Resources   (South Korea)

^b UNIVERSITY OF WESTERN ONTARIO   (Canada)

^c NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Depth profiling; MEIS; QUARK; Zr silicate

Indexed keywords

EID: 0037321055     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1567-1739(02)00240-7     Document Type: Article

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