Quantitative analysis of deuterium in a-C:D layers, a Round Robin experiment

Journal of Nuclear Materials

Volumn 281, Issue 1, 2000, Pages 42-56

  Behrisch, R ^a   Mayer, M ^a   Jacob, W ^a   Assmann, W ^b   Dollinger, G ^c   Bergmaier, A ^c   Kreissig, U ^d   Friedrich, M ^d   Sun, G Y ^d   Hildebrandt, D ^a   Akbi, M ^a   Schneider, W ^a   Schleussner D ^e   Knapp, W ^e   Edelmann, C ^e  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b UNIVERSITY OF MUNICH   (Germany)

^c TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^d INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^e Inst für Experimentelle Physik   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CARBON; DESORPTION; GLOW DISCHARGES; ION BEAMS; PLASMA APPLICATIONS; SECONDARY ION MASS SPECTROMETRY; SILICON; SUBSTRATES;

DEUTERATED CARBON; THERMAL DESORPTION SPECTROMETRY (TDS);

DEUTERIUM;

EID: 0034274657     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3115(00)00069-6     Document Type: Article

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