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Volumn 94, Issue 11, 2003, Pages 7017-7024

Solid state quantum computer development in silicon with single ion implantation

Author keywords

[No Author keywords available]

Indexed keywords

QUANTUM BITS (QUBIT); QUANTUM COMPUTERS; READOUT STRUCTURES;

EID: 0346962496     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1622109     Document Type: Article
Times cited : (102)

References (50)
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    • Schenkel, T.1    Hamza, A.V.2    Barnes, A.V.3    Schneider, D.H.4
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    • Hattass, M.1
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    • to be published
    • T. Schenkel, V. Radmilovic, E. A. Stach, S.-J. Park, and A. Persaud, presented at the 47th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Tampa, FL, 2003; J. Vac. Sci. Technol. B (to be published).
    • J. Vac. Sci. Technol. B
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    • unpublished
    • A. Voigt, F. Shi, P. Hudek, I. W. Rangelow, and K. Edinger, J. Vac. Sci. Technol. B 18, 3525 (2000); R. G. Clark (unpublished).
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    • A. T. Fiory et al., J. Electron. Mater. 31, 999 (2002); earlier studies reported complex dose dependences for higher energy P implants: see e.g., M. Miyao, N. Yoshihiro, T. Tokuyama, and T. Mitsuishi, J. Appl. Phys. 49, 2573 (1978) and references therein.
    • (2002) J. Electron. Mater. , vol.31 , pp. 999
    • Fiory, A.T.1
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    • and references therein
    • A. T. Fiory et al., J. Electron. Mater. 31, 999 (2002); earlier studies reported complex dose dependences for higher energy P implants: see e.g., M. Miyao, N. Yoshihiro, T. Tokuyama, and T. Mitsuishi, J. Appl. Phys. 49, 2573 (1978) and references therein.
    • (1978) J. Appl. Phys. , vol.49 , pp. 2573
    • Miyao, M.1    Yoshihiro, N.2    Tokuyama, T.3    Mitsuishi, T.4
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    • P. B. Griffin, S. W. Crowder, and J. M. Knight, Appl. Phys. Lett. 67, 482 (1995); A. Ural, P. B. Griffin, and J. D. Plummer, J. Appl. Phys. 85, 6440 (1999).
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    • and the QIS roadmap
    • It is interesting to consider convergence points in device control requirements as formulated in the International Technology Roadmap for Semiconductors, ITRS, http://public.itrs.net/ and the QIS roadmap.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.