Can single-electron integrated circuits and quantum computers be fabricated in silicon?

International Journal of Circuit Theory and Applications

Volumn 28, Issue 6, 2000, Pages 553-562

  Tucker, J R ^a   Shen, T C ^b  

^a University of Illinois at Urbana Champaign   (United States)

^b UTAH STATE UNIVERSITY   (United States)

Author keywords

Nanotechnology; Quantum computers; Single electronics; STM lithography

Indexed keywords

ELECTRON TUNNELING; LITHOGRAPHY; LSI CIRCUITS; MOLECULAR BEAM EPITAXY; NANOTECHNOLOGY; QUANTUM ELECTRONICS; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR QUANTUM DOTS;

QUANTUM COMPUTERS; SINGLE ELECTRON INTEGRATED CIRCUITS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0034311917     PISSN: 00989886     EISSN: None     Source Type: Journal    
DOI: 10.1002/1097-007X(200011/12)28:6<553::AID-CTA127>3.0.CO;2-I     Document Type: Article

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