Single ion implantation for solid state quantum computer development

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 6, 2002, Pages 2819-2823

  Schenkel, T ^a   Persaud, A ^a   Park, S J ^a   Meijer, J ^a,e   Kingsley, J R ^b   McDonald, J W ^c   Holder, J P ^c   Bokor, J ^a,d   Schneider, D H ^c  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b CHARLES EVANS AND ASSOCIATES   (United States)

^c LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

^e RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ELECTRON BEAM LITHOGRAPHY; ELECTRON EMISSION; IMPACT IONIZATION; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; QUANTUM THEORY;

NANOMETER PRECISION; QUANTUM ALGORITHMS; RESOLUTION LIMITING FACTORS; SOLID STATE QUANTUM COMPUTER;

ION IMPLANTATION;

EID: 0036883173     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1518016     Document Type: Article

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