Novel method for silicon quantum wire transistor fabrication

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 3244-3247

  Kedzierski, Jakub ^a   Bokor, Jeffrey ^a   Anderson, Erik ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033275059     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590989     Document Type: Article

References (9)

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