Surface engineering for reliable operation of MEMS devices

Journal of Adhesion Science and Technology

Volumn 17, Issue 4, 2003, Pages 583-591

  Maboudian, Roya ^a   Carraro, Carlo ^a  

^a University of California   (United States)

Author keywords

MEMS; reliability.; stiction; tribology

Indexed keywords

LENGTH SCALE; MEMS DEVICES; MEMS TECHNOLOGY; NON-SILICON; RAPID DEVELOPMENT; RELIABILITY PROBLEMS; RELIABLE OPERATION; RELIABLE PERFORMANCE; SURFACE ENGINEERING; TRIBOLOGICAL ISSUES;

MEMS; RELIABILITY; TRIBOLOGY; MICROMACHINING; SEMICONDUCTING SILICON; STICTION; SURFACES;

STICTION; MICROELECTROMECHANICAL DEVICES;

MICROELECTROMECHANICAL SYSTEM TECHNOLOGY; SURFACE ENGINEERING;

EID: 0037257165     PISSN: 01694243     EISSN: 15685616     Source Type: Journal    
DOI: 10.1163/15685610360554429     Document Type: Article

References (45)

1. R. S. Muller, R. T. Howe, S. D. Senturia, R. L. Smith and R. M. White, Microsensors. IEEE Press, New York (1990).
2. S. M. Sze, Semiconductor Sensors.Wiley, New York (1994).
3. J. Bryzek, K. Petersen andW. McCulley, IEEE Spectrum 31 (May), 20-31 (1994).
4. W. S. Trimmer, Micromechanics and MEMS, Classic and Seminal Papers to 1990. IEEE Press, New York (1996).
5. M. J. Madou, Fundamentals of Microfabrication. CRC Press, Boca Raton, FL (1997).
6. R. T. Howe, J. Vac. Sci. Technol. B 6, 1809-1813 (1988).
7. R. S. Muller, Sensors and Actuators A21, 1-8 (1990).
8. K. Petersen, Proc. IEEE Electron Devices 70, 420-457 (1982).
9. K. Komvopoulos,Wear 200, 305-327 (1996).
10. N. Tas, T. Sonnenberg, H. Jansen, R. Legtenberg and M. Elwenspoek, J. Micromech. Microeng. 6, 385-397 (1996).
11. C. H. Mastrangelo, Tribology Lett. 3, 223-238 (1997).
12. R. Maboudian and R. T. Howe, J. Vac. Sci. Technol. B 15, 1-20 (1997).
13. R. Maboudian, Surface Sci. Reports 30, 207-269 (1998).
14. R. Maboudian, MRS Bulletin 23, 47-51 (1998).
15. Z. Rymuza, Microsystem Technologies 5, 173-180 (1999).
16. B. Bhushan (Ed.), Proceedings of Tribology Issues and Opportunities in MEMS Workshop. Kluwer Academic Publishers, Dordrecht (1998).
17. M. P. de Boer and T. M. Mayer, MRS Bulletin 26, 302-304 (2001).
18. S. Henck, Tribology Lett. 3, 239-247 (1997).
19. S. L. Miller, M. S. Rogers, G. La Vigne, J. J. Sniegowski, D. M. Tanner and K. A. Peterson, Microelectronics Reliability 39, 1229-1237 (1999).
20. R. Maboudian and R. T. Howe, Tribology Lett. 3, 215-222 (1997).
21. C.-J. Kim, J. Y. Kim and B. Sridharan, Sensors and Actuators A64, 17 (1998).
22. H. Guckel, J. J. Sniegowski, T. R. Christenson and F. Raissi, Sensors and Actuators A21-A23, 46 (1990).
23. G. T. Mulhern, D. S. Soane and R. T. Howe, in: Proc. 7th Int. Conf. on Solid-State Sensors and Actuators- Transducers '93, Yokohama, Japan, pp. 296-300 (1993).
24. C. H. Mastrangelo and G. S. Saloka, in: Proc. IEEE Micro-Electro- Mechanical Systems Workshop, Ft. Lauderdale, FL, pp. 77-81 (1993).
25. D. Kobayashi, C.-J. Kim and H. Fujita, Jpn. J. Appl. Phys. 32, L 1642 (1993).
26. F. Kozlowski, N. Lindmair, Th. Scheiter, C. Hierold and W. Lang, in: Proc. 8th Int. Conf. on Solid-State Sensors and Actuators - Transducers '95, Stockholm, Sweden, pp. 220-223, (1995).
27. J. H. Lee, Y. I. Lee, W. I. Jang, C. S. Lee and H. J. Yoo, Sensors and Actuators A64, 27-32 (1998).
28. U. Srinivasan, M. R. Houston, R. T. Howe and R. Maboudian, J. MEMS 7, 252-260 (1998).
29. R. Maboudian,W. R. Ashurst and C. Carraro, Sensors and Actuators A82, 219-223 (2000).
30. R. Maboudian,W. R. Ashurst and C. Carraro, Tribology Lett. 12, 95-100 (2002).
31. X. Y. Zhu and J. E. Houston, Tribology Lett. 7, 87-90 (1999).
32. X. Y. Zhu, V. Boiadjiev, J. A. Mulder, R. P. Hsung and R. C. Major, Langmuir 16, 6766-6772 (2000).
33. J. Sakata, T. Tsuchiya, A. Inoue, S. Tokumitsu and H. Funabashi, in:Proceed. 10th Int. Conf. Solid-State Sensors and Actuators, Transducers '99, Sendai, Japan, pp. 26-29 (1999).
34. T. M. Mayer, M. P. de Boer, N. D. Shinn, P. J. Clews and T. A. Michalske, J. Vac. Sci. Technol. B 18, 2433-2440 (2000).
35. E. Bhattacharya, J. Kuang, M. Judy and J. Martin, in: Proceedings of InternationalWorkshop on Physics of Semiconductor Devices, Delhi, India (2000).
36. E. Bhattacharya, J. Kuang, M. Judy and J. Martin, in: Proceedings of SPIE International Symposium on MEMS, Adelaide, Australia (2001).
37. P. F. Man, B. P. Gogoi and C. H. Mastrangelo, J. MEMS 6, 25-34 (1997).
38. B. K. Smith, J. J. Sniegowski, G. LaVigne and C. Brown, Sensors and Actuators A70, 159-163 (1998).
39. J. L. A. Yeh, H. Jiang, H. P. Neves and N. C. Tien, J. MEMS 9, 281-290 (2000).
40. A. Ulman, An Introduction to Ultrathin Organic Films. Academic Press, San Diego (1991).
41. L. Magagnin, R.Maboudian and C. Carraro, ElectrochemicalSolid-StateLett. 4, C5-C7 (2001).
42. L. Magagnin, C. Carraro and R. Maboudian, Electrochimica Acta (in press).
43. M. Mehregany and C. A. Zorman, Thin Solid Films 355-356, 518 (1999).
44. C. R. Stoldt, M. C. Fritz, C. Carraro and R. Maboudian, Appl. Phys. Lett. 79, 347-349 (2001).
45. J. P. Sullivan, T. A. Friedmann and K. Hjort, MRS Bulletin 26, 309-311 (2001).