Failure modes in surface micromachined microelectromechanical actuation systems

Microelectronics Reliability

Volumn 39, Issue 8, 1999, Pages 1229-1237

  Miller, S L ^a   Rodgers, M S ^a   La Vigne, G ^a   Sniegowski, J J ^a   Clews, P ^a   Tanner, D M ^a   Peterson, K A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FAILURE ANALYSIS; MATHEMATICAL MODELS; MICROMACHINING; OPTIMIZATION; STICTION;

SURFACE MACHINED MICROELECTROMECHANICAL ACTUATION SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033321310     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(99)00013-X     Document Type: Article

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