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Thin Solid Films

Volumn 402, Issue 1-2, 2002, Pages 1-37

Formation of polymer-like hydrocarbon films from radical beams of methyl and atomic hydrogen

(1) Von Keudell, Achim a

a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK (Germany)

Author keywords

Growth mechanism; Hydrocarbon; Plasma processing and deposition; Polymers

Indexed keywords

CHEMISORPTION; ELLIPSOMETRY; FILM GROWTH; HYDROCARBONS; INFRARED SPECTROSCOPY; LOW TEMPERATURE EFFECTS;

HYDROCARBON FILMS;

PLASTIC FILMS;

EID: 0036150219 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01670-4 Document Type: Review

Times cited : (91)

References (188)

1
- 0015080715
- (1971) J. Appl. Phys. , vol.42 , pp. 2953
- Aisenberg, S.¹ Chabot, R.²

2
- 84947669494
- (1987) J. Vac. Sci. Technol. A , vol.5 , pp. 3287
- Tsai, H.¹ Bogy, D.B.²

3
- 0009661538
- (1988) Science , vol.241 , pp. 913
- Angus, J.C.¹ Hayman, C.C.²

4
- 0013000686
- (1989) Mater. Sci. Forum , vol.52-53 , pp. 41
- Koidl, P.¹ Wild, C.² Dischler, B.³ Wagner, J.⁴ Ramsteiner, M.⁵

5
- 0000711414
- (1992) Diamond Rel. Mater. , vol.1 , pp. 805
- Lettington, H.¹ Smith, C.²

6
- 0000244183
- (1993) Philos. Trans. R. Soc. Lond. , vol.342 , pp. 287
- Lettington, H.¹

7
- 0032614255
- (1999) Diamond Rel. Mater. , vol.8 , pp. 428
- Grill, A.¹

8
- 0026108726
- (1991) Jpn. J. Appl. Phys. , vol.30 , pp. 376
- Amemiya, H.¹ Ishii, S.² Shigueoka, Y.³

9
- 0030104632
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 535
- Hollenstein, C.¹ Schwarzenbach, W.² Howling, A.³ Courteille, C.⁴ Dorier, J.⁵ Sansonnens, L.⁶

10
- 0008003797
- Ph.D. Thesis, Universität Bayreuth
- (1997)
- Pecher, P.¹

11
- 0003074110
- (1998) Appl. Phys. Lett. , vol.73 , pp. 31
- Pecher, P.¹ Jacob, W.²

12
- 0032482860
- (1998) Thin Solid Films , vol.326 , pp. 1
- Jacob, W.¹

13
- 0028460760
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 4303
- Kae-Nune, P.¹ Perrin, J.² Guillon, J.³ Jolly, J.⁴

14
- 0012225405
- (1995) Plasma Sources Sci. Technol. , vol.4 , pp. 250
- Kae-Nune, P.¹

15
- 21544484514
- (1990) Appl. Phys. Lett. , vol.56 , pp. 2298
- Harris, S.¹

16
- 0028032842
- (1994) Nature , vol.372 , pp. 535
- Frenklach, M.¹ Sokov, S.² Weiner, B.³

17
- 0345623806
- (1993) Appl. Phys. A , vol.56 , pp. 513
- Klages, C.¹

18
- 0007041336
- (1993) J. Phys. Chem. , vol.97 , pp. 23
- Harris, S.J.¹ Goodwin, D.G.²

19
- 11944260539
- (1992) Science , vol.255 , pp. 835
- Garrison, B.¹ Dawnkaski, E.² Srivastava, D.³ Brenner, D.⁴

20
- 0018469799
- (1979) J. Appl. Phys. , vol.50 , pp. 3189
- Coburn, J.¹ Winters, H.²

21
- 0026743719
- (1992) Surf. Sci. Reports , vol.14 , pp. 161
- Winters, H.F.¹ Coburn, J.W.²

22
- 0001025098
- (1989) Mater. Sci. Forum , vol.52-53 , pp. 577
- Woollam, J.A.¹ De, B.² Orzesko, S.³ Ianno, N.⁴ Synder, P.⁵ Alterovitz, S.⁶ Poch, J.⁷ Wu, R.⁸ Ingram, D.⁹

23
- 0027559270
- (1993) Surf. Coat. Technol. , vol.56 , pp. 273
- Kimock, F.M.¹ Knapp, B.J.²

24
- 0008005023
- (1996) J. Appl. Phys. , vol.79 , pp. 5776
- Wang, L.¹ Halada, G.² Gambino, R.³ Hayes, A.⁴ DiStefano, S.⁵

25
- 0040939687
- (1991) Rev. Phys. Chem. , vol.42 , pp. 643
- Celii, F.¹ Butler, J.²

26
- 0024628444
- (1989) J. Nucl. Mater. , vol.161 , pp. 265
- Winter, J.¹

27
- 0027885686
- (1993) J. Nucl. Mater. , vol.207 , pp. 62
- Federici, G.¹ Wu, C.H.²

28
- 0030230838
- (1996) Plasma Pys. Contr. Fusion , vol.38 , pp. 1503
- Winter, J.¹

29

30
- 0032156973
- (1998) Fusion Eng. Des. , vol.39-40 , pp. 445
- Federici, G.¹ Anderl, R.² Brooks, J.N.³ Causey, R.⁴ Coad, J.P.⁵ Cowgill, D.⁶ Doerner, R.⁷ Haasz, A.⁸ Longhurst, G.⁹ Luckhardt, S.¹⁰ Mueller, D.¹¹ Peacock, A.¹² Pick, M.¹³ Skinner, C.¹⁴ Wampler, W.¹⁵ Wilson, K.¹⁶ Wong, C.¹⁷ Wu, C.¹⁸ Youchison, D.¹⁹

31
- 0001630770
- (1985) Appl. Phys. Lett. , vol.47 , pp. 750
- Kaplan, S.¹ Jansen, F.² Machonkin, M.³

32
- 21544483271
- (1991) Appl. Phys. Lett. , vol.58 , pp. 592
- Tamor, M.A.¹ Vassell, W.C.² Carduner, K.R.³

33
- 21544464118
- (1987) J. Appl. Phys. , vol.61 , pp. 2874
- Grill, A.¹ Meyerson, B.S.² Patel, V.³ Reimer, J.A.⁴ Petrich, M.A.⁵

34
- 0000733948
- (1994) Phys. Rev. B , vol.50 , pp. 846
- Jäger, C.¹ Gottwald, J.² Spiess, H.W.³ Newport, R.J.⁴

35
- 30244535151
- (1987) Phys. Rev. B , vol.35 , pp. 2946
- Robertson, J.¹ O'Reilly, E.²

36
- 0040282525
- (1997) Philos. Mag. B , vol.76 , pp. 335
- Roberston, J.¹

37
- 0000121063
- (1979) Phys. Rev. Lett. , vol.42 , pp. 1151
- Phillips, J.C.¹

38
- 18544366860
- (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 1778
- Angus, J.C.¹ Jansen, F.²

39
- 0000800377
- (1992) Phys. Rev. Lett. , vol.68 , pp. 220
- Robertson, J.¹

40
- 21544442978
- (1993) Appl. Phys. Lett. , vol.63 , pp. 1771
- Jacob, W.¹ Möller, W.²

41
- 0001024036
- (1991) Appl. Phys. Lett. , vol.59 , pp. 2391
- Möller, W.¹

42
- 0003550176
- Computer simulation of ion solid interactions
- Berlin and Heidelberg
- (1991) Springer Series in Materials Science
- Eckstein, W.¹

43
- 0001069486
- (1987) Appl. Phys. Lett. , vol.50 , pp. 1870
- Möller, W.¹ Scherzer, B.M.U.²

44
- 32144459568
- (1990) Phys. Rev. B , vol.41 , pp. 10468
- Lifshitz, Y.¹ Kasi, S.R.² Rabalais, J.W.³ Eckstein, W.⁴

45
- 0000648081
- (1996) Diam. Rel. Mater. , vol.5 , pp. 388
- Lifshitz, Y.¹

46
- 0025627326
- (1990) IEEE Trans. Plasma Sci. , vol.18 , pp. 883
- Sanders, D.¹ Boercker, D.² Falabella, S.³

47
- 0034492630
- (2000) Surf. Coat. Technol. , vol.133 , pp. 78
- Sanders, D.¹ Anders, A.²

48
- 0028449481
- (1994) Thin Solid Films , vol.246 , pp. 92
- Scheibe, H.¹ Schultrich, B.²

49
- 0027583036
- (1993) Diam. Rel. Mater. , vol.2 , pp. 782
- Veerasamy, S.¹ Amaratunga, G.² Milne, W.³ Hewitt, P.⁴ Fallon, P.⁵ McKenzie, D.⁶ Davis, C.⁷

50
- 0000451335
- (1994) Appl. Phys. Lett. , vol.64 , pp. 2797
- Weiler, M.¹ Sattel, S.² Jung, K.³ Ehrhardt, H.⁴ Veerasamy, V.S.⁵ Robertson, J.⁶

51
- 0000879286
- (1993) Phys. Rev. B , vol.48 , pp. 4777
- Fallon, P.J.¹ Veerasamy, V.S.² Davis, C.A.³ Robertson, J.⁴ Amaratunga, G.⁵ Milne, W.I.⁶ Koskinen, J.⁷

52
- 0026816817
- (1992) Surf. Coat. Technol. , vol.50 , pp. 185
- Robertson, J.¹

53
- 0043059594
- (1993) Diam. Rel. Mater. , vol.2 , pp. 984
- Robertson, J.¹

54
- 0001585879
- (1993) Phil. Trans. R. Soc. Lond. A , vol.342 , pp. 277
- Robertson, J.¹

55
- 0001580906
- (1995) Diam. Rel. Mater. , vol.4 , pp. 318
- Lifshitz, Y.¹ Lempert, G.² Grossmann, E.³ Avigal, I.⁴ Uzan-Saguy, C.⁵ Kalish, R.⁶ Marton, D.⁷ Rabalais, J.⁸

56
- 0001083841
- (1995) Phys. Lett. A , vol.205 , pp. 287
- Hakovirta, M.¹ Salo, J.² Lappalainen, R.³ Antilla, A.⁴

57
- 0032003070
- (1998) Appl. Phys. A , vol.66 , pp. 153
- Hofsäss, H.¹ Feldermann, H.² Merk, R.³ Sebastian, M.⁴ Ronning, C.⁵

58
- 0000803560
- (1996) J. Appl. Phys. , vol.80 , pp. 5986
- Gielen, J.W.A.M.¹ Kleuskens, P.R.M.² Van de Sanden, M.C.M.³ Van Ijzendoorn, L.J.⁴ Schram, D.⁵ Dekempeneer, E.H.A.⁶ Meneve, J.⁷

59
- 0001323515
- (1996) Appl. Phys. Lett. , vol.69 , pp. 152
- Gielen, J.W.A.M.¹ Van de Sanden, M.C.M.² Schram, D.³

60
- 0030205296
- (1996) Plasma Sources Sci. Technol. , vol.5 , pp. 492
- Gielen, J.W.A.M.¹ Van de Sanden, M.C.M.² Kleuskens, P.R.M.³ Schram, D.C.⁴

61
- 0001550788
- (1997) J. Appl. Phys. , vol.82 , pp. 2643
- Gielen, J.W.A.M.¹ Kessels, W.M.M.² Van de Sanden, M.C.M.³ Schram, D.⁴

62
- 0000369058
- (1990) Appl. Phys. Lett. , vol.56 , pp. 2616
- Sugai, H.¹ Kojima, H.² Ishida, A.³ Toyoda, H.⁴

63
- 0000761465
- (1989) Mater. Sci. Forum , vol.52-53 , pp. 175
- Catherine, Y.¹

64
- 0032685276
- (1999) J. Phys. D , vol.32 , pp. 1876
- Deschenaux, C.¹ Affolter, A.² Magni, D.³ Hollenstein, C.⁴ Fayet, P.⁵

65
- 0034295431
- (2000) Plasma Phys. Controlled Fusion , vol.42
- Hollenstein, C.¹

66
- 0001348479
- (1989) Appl. Phys. Lett. , vol.55 , pp. 1507
- Kojima, H.¹ Toyoda, H.² Sugai, H.³

67
- 0022810595
- (1986) Thin Solid Films , vol.144 , pp. 265
- Catherine, Y.¹ Couderc, P.²

68
- 36549092928
- (1989) Appl. Phys. Lett. , vol.54 , pp. 1507
- Toyoda, H.¹ Kojima, H.² Sugai, H.³

69
- 84985788225
- (1988) Contrib. Plasma Phys. , vol.28 , pp. 149
- Deutsch, H.¹ Kersten, H.² Klagge, S.³ Rutscher, A.⁴

70
- 0000472761
- (1993) Appl. Phys. Lett. , vol.62 , pp. 937
- Von Keudell, A.¹ Möller, W.² Hytry, R.³

71
- 36448998904
- (1994) J. Appl. Phys. , vol.75 , pp. 7718
- Von Keudell, A.¹ Möller, W.²

72
- 0003954574
- Princeton Plasma Physics Laboratory
- (1987) Technical Report PPPL-2477
- Ehrhardt, H.¹ Langer, W.D.²

73
- 36149018208
- (1929) Phys. Rev. , vol.34 , pp. 876
- Tonks, L.¹ Langmuir, I.²

74
- 0000169592
- (1995) Appl. Opt. , vol.34 , pp. 4542
- Engelhard, M.¹ Jacob, W.² Möller, W.³ Koch, A.⁴

75
- 0029184886
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 261
- Gogolides, E.¹ Mary, D.² Rhallabi, A.³ Turban, G.⁴

76
- 0000335922
- (1996) J. Appl. Phys. , vol.79 , pp. 1092
- Von Keudell, A.¹ Jacob, W.²

77
- 36549104732
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1028
- Toyoshima, Y.¹ Arai, K.² Matsuda, A.³ Tanaka, K.⁴

78
- 0001359307
- (1990) Appl. Phys. Lett. , vol.56 , pp. 1540
- Toyoshima, Y.¹ Arai, K.² Matsuda, A.³ Tanaka, K.⁴

79
- 43949162251
- (1990) Thin Solid Films , vol.234 , pp. 367
- Toyoshima, Y.¹

80
- 0000228489
- (1997) Appl. Phys. Lett. , vol.70 , pp. 1137
- Yamasaki, S.¹ Umeda, T.² Isoya, J.³ Tanaka, K.⁴

81
- 0001841364
- (1990) Surf. Sci. , vol.227 , pp. 50
- Matsuda, A.¹ Nomoto, K.² Takeuchi, Y.³ Suzuki, A.⁴ Yuuki, A.⁵ Perrin, J.⁶

82
- 0022987138
- (1986) Mater. Res. Soc. Proc. , vol.70 , pp. 3
- Gallagher, A.¹

83
- 0000070491
- (1989) Surf. Sci. , vol.210 , pp. 114
- Perrin, J.¹ Takeda, Y.² Hirano, N.³ Takeuchi, Y.⁴ Matsuda, A.⁵

84
- 0000116833
- (1991) J. Non-Cryst. Solids , vol.137-138 , pp. 639
- Perrin, J.¹

85
- 35949011837
- (1989) Phys. Rev. Lett. , vol.62 , pp. 567
- Sinniah, K.¹ Sherman, M.² Lewis, L.³ Weinberg, W.⁴ Yates, J.⁵ Janda, K.⁶

86
- 0348212564
- (1995) Phys. Rev. Lett. , vol.74 , pp. 2074
- Widdra, W.¹ Yi, S.² Maboudian, R.³ Briggs, G.⁴ Weinberg, W.⁵

87
- 36449009023
- (1993) J. Chem. Phys. , vol.99 , pp. 5619
- Koleske, D.¹ Gates, S.² Schultz, J.³

88
- 3342997684
- (2000) J. Non-Cryst. Solids , vol.226-269 , pp. 23
- Parsons, G.¹

89
- 0001356173
- (1999) Phys. Rev. B , vol.59 , pp. 5791
- Von Keudell, A.¹ Abelson, J.R.²

90
- 0001599763
- (1999) J. Appl. Phys. , vol.86 , pp. 2872
- Ramalingam, S.¹ Maroudas, D.² Aydil, E.S.³

91
- 0000057124
- (2000) Chem. Phys. Lett. , vol.329 , pp. 304
- Walch, S.¹ Ramalingam, S.² Aydil, E.³ Maroudas, D.⁴

92
- 0031177619
- (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 4752
- Shiratani, M.¹ Jolly, J.² Videlot, H.³ Perrin, J.⁴

93
- 0032351436
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 278
- Perrin, J.¹ Shiratani, M.² Kae-Nune, P.³ Videlot, H.⁴ Jolly, J.⁵ Guillon, J.⁶

94
- 0001435806
- (1990) J. Appl. Phys. , vol.67 , pp. 6220
- Doughty, D.A.¹ Doyle, J.R.² Lin, G.H.³ Gallagher, A.⁴

95
- 36449007299
- (1994) J. Appl. Phys. , vol.76 , pp. 3123
- Nuruddin, A.¹ Doyle, J.R.² Abelson, J.R.³

96
- 0001461620
- (2000) J. Appl. Phys. , vol.87 , pp. 3313
- Kessels, W.M.M.¹ Van de Sanden, M.C.M.² Severens, R.J.³ Schram, D.C.⁴

97
- 0001704616
- (1999) Appl. Phys. Lett. , vol.74 , pp. 3800
- Hopf, C.¹ Letourneur, K.² Jacob, W.³ Schwarz-Selinger, T.⁴ Von Keudell, A.⁵

98
- 0001276268
- (2000) J. Appl. Phys. , vol.87 , pp. 2719
- Hopf, C.¹ Schwarz-Selinger, T.² Jacob, W.³ Von Keudell, A.⁴

99
- 0033322817
- (1999) Nucl. Fusion , vol.39 , pp. 1451
- Von Keudell, A.¹ Hopf, C.² Schwarz-Selinger, T.³ Jacob, W.⁴

100
- 21144474173
- (1992) J. Chem. Phys. , vol.168 , pp. 293
- Heydtmann, H.¹ Boglu, D.² Sloan, J.³

101
- 0001498338
- (1986) Rev. Sci. Instrum. , vol.57 , pp. 359
- Van Zyl, B.¹ Gealy, M.W.²

102
- 32444435235
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 458
- Bischler, U.¹ Bertel, E.²

103
- 0007952891
- Patent DE 19757851 C1 20, October 1999
- Horn, A.¹ Kammler, T.² Kappel, M.³

104
- 0000078512
- (1998) J. Appl. Phys. , vol.84 , pp. 4065
- Tschersich, K.¹ Von Bonin, V.²

105
- 0000231230
- (2000) J. Appl. Phys. , vol.87 , pp. 2565
- Tschersich, K.G.¹

106
- 0001148280
- (1985) J. für Praktische Chemie , vol.327 , pp. 868
- Remmler, M.¹ Ondruschka, B.² Zimmermann, G.³

107
- 0034187862
- (2000) J. Vac. Sci. Technol A , vol.18 , pp. 995
- Schwarz-Selinger, T.¹ Von Keudell, A.² Jacob, W.³

108
- 0035104820
- (2001) J. Vac. Sci. Technol A , vol.19 , pp. 101
- Schwarz-Selinger, T.¹ Dose, V.² Jacob, W.³ Von Keudell, A.⁴

109
- 34250931356
- (1930) Zeitschrift für Physik , vol.66 , pp. 471
- Clausing, P.¹

110
- 84979123137
- (1932) Annalen der Physik , vol.12 , pp. 961
- Clausing, P.¹

111
- 0007955812
- (1958) Vakuum-Technik , vol.7 , pp. 7
- Dayton, B.B.¹

112
- 0015633793
- (1973) Vakuum-Technik , vol.22 , pp. 106
- Gottwald, B.A.¹

113
- 0007952892
- 2000
- Meier, M.¹ Von Keudell, A.²

114
- 29744448914
- (1986) J. Phys. Chem. Ref. Data , vol.15 , pp. 1087
- Tsang, W.¹ Hampson, R.F.²

115
- 0003588966
- Van Nostrand Reinhold Company, New York
- (1966) Molecular Spectra and Molecular Structure III
- Herzberg, G.¹

116
- 0003804824
- Heyden and Son Ltd, London
- (1979) Compilation of Mass Spectral Data
- Cornu, A.¹ Massot, A.²

117
- 0029678875
- (1996) J. Phys. B , vol.29 , pp. 139
- Tarnovsky, V.¹ Levin, A.² Deutsch, H.³ Becker, K.⁴

118
- 0001483460
- (1988) Chem. Phys. Lett. , vol.152 , pp. 513
- Wang, D.¹ Lee, L.²

119
- 3342955764
- (1984) Phys. Rev. Lett. , vol.53 , pp. 771
- Baiocchi, F.¹ Wetzel, R.² Freund, R.³

120
- 0007963438
- 2001
- Schwarz-Selinger, T.¹ Preuss, R.² Dose, V.³ Von der Linden, W.⁴

121
- 0000463342
- (1988) Phys. Rev. B , vol.38 , pp. 2988
- Boutard, D.¹ Möller, W.² Scherzer, B.M.U.³

122
- 0000599338
- (1989) J. Appl. Phys. , vol.65 , pp. 3833
- Boutard, D.¹ Scherzer, B.M.U.² Möller, W.³

123
- 0003808259
- Elsevier Science Publishers, Amsterdam
- (1977) Ellipsometry and Polarized Light
- Azzam, R.M.A.¹ Bashara, N.M.²

124
- 0016425448
- (1975) Appl. Opt. , vol.14 , pp. 220
- Aspnes, D.E.¹ Studna, A.A.²

125
- 0007959587
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 2874
- Collins, R.W.¹

126
- 4243281650
- (1969) Surf. Sci. , vol.14 , pp. 52
- Bootsma, G.A.¹ Meyer, F.²

127
- 0003972070
- Pergamon Press, Oxford
- (1964) Principles of Optics
- Born, M.¹ Wolf, E.²

128
- 84950665006
- (1933) Proc. Cambridge Phil. Soc. , vol.29 , pp. 116
- Strachan, C.S.¹

129
- 0000333056
- (1956) Sov. Phys.-JETP , vol.3 , pp. 269
- Sivukhin, D.V.¹

130
- 0007911048
- (1966) J. Phys. Chem. , vol.70 , pp. 1702
- Hall, A.C.¹

131
- 84929177658
- (1989) J. Vac. Sci. Technol A , vol.7 , pp. 2104
- Chabal, Y.¹ Higashi, G.² Raghavachari, K.³ Burrows, V.⁴

132
- 0000832452
- (1993) Int. J. Mod. Phys. B , vol.7 , pp. 1031
- Chabal, Y.¹

133
- 0000240403
- (1999) Surf. Rev. Lett. , vol.6 , pp. 225
- Dumas, P.¹ Weldon, M.² Chabal, Y.³ Williams, G.⁴

134
- 0008002372
- (1997) J. Phys. IV , vol.7 , pp. 3
- Chabal, Y.¹ Weldon, M.² Marsico, V.³

135
- 0029273205
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 258
- Aydil, E.¹ Zhou, Z.² Gottscho, R.³ Chabal, Y.⁴

136
- 0018442413
- (1979) Phys. Stat. Sol. B , vol.92 , pp. 99
- Wieder, H.¹ Cardona, M.² Guarnieri, C.³

137
- 0001662102
- (1998) Phys. Rev. B , vol.58 , pp. 13957
- Heitz, T.¹ Drevillon, B.² Godet, C.³ Bouree, J.⁴

138
- 0019032858
- (1980) Phys. Stat. Sol. B , vol.100 , pp. 43
- Shanks, H.¹ Fang, C.² Ley, L.³ Cardona, M.⁴ Demons, F.⁵ Kalbitzer, S.⁶

139
- 0000330748
- (1977) Phys. Rev. B , vol.16 , pp. 3356
- Brodsky, M.H.¹ Cardona, M.² Cuomo, J.J.³

140
- 0001383858
- (1979) Phys. Rev. B , vol.19 , pp. 2064
- Lucovsky, C.¹ Nemanich, R.² Knights, J.C.³

141
- 0000846907
- (1940) Proc. R. Soc. Lond. A , vol.175 , pp. 208
- Fox, J.¹ Martin, A.²

142
- 0030573158
- (1996) Chem. Phys. Lett. , vol.263 , pp. 1
- Kong, M.¹ Lee, S.S.² Lyubovitsky, J.³ Bent, S.F.⁴

143
- 0018431122
- (1979) J. Appl. Phys. , vol.50 , pp. 1053
- Phillip, H.¹

144
- 0022699270
- (1986) Appl. Phys. A , vol.39 , pp. 257
- Grosse, P.¹ Harbecke, B.² Heinz, B.³ Meyer, R.⁴ Offenberg, M.⁵

145
- 0022234065
- (1985) Appl. Phys. A , vol.38 , pp. 263
- Harbecke, B.¹ Heinz, B.² Grosse, P.³

146
- 0022677529
- (1986) Appl. Phys. B , vol.39 , pp. 165
- Harbecke, B.¹

147
- 0031492683
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 402
- Von Keudell, A.¹ Jacob, W.²

148
- 0032185305
- (1998) J. Appl. Phys. , vol.84 , pp. 3836
- Ristein, J.¹ Stief, R.T.² Ley, L.³ Beyer, W.⁴

149
- 0000595958
- (1996) Appl. Phys. Lett. , vol.68 , pp. 475
- Jacob, W.¹ Unger, M.²

150
- 21544438866
- (1992) Appl. Phys. Lett. , vol.60 , pp. 2089
- Grill, A.¹ Patel, V.²

151
- 3643064461
- (1966) J. Chem. Phys. , vol.44 , pp. 310
- Greenler, R.¹

152
- 0014591058
- (1969) Surf. Sci. , vol.17 , pp. 372
- Bradshaw, A.¹ Pritchard, J.²

153
- 0003449930
- Wiley-Interscience, New York
- (1967) Internal Reflection Spectroscopy
- Harrick, N.¹

154
- 21844502943
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 2005
- Katiyar, M.¹ Abelson, J.R.²

155
- 0007907359
- 2000
- De Graaf, A.¹ Van de Sanden, M.C.M.²

156
- 0020829528
- (1983) Solid State Commun. , vol.48 , pp. 105
- Dischler, B.¹ Bubenzer, A.² Koidl, P.³

157
- 0003735814
- John Wiley and Sons, London
- (1980) Infrared Characteristic Group Frequencies
- Socrates, G.¹

158
- 0008003023
- Von Keudell, A.¹ Letourneur, K.² Schram, D.C.³ Van de Sanden, M.C.M.⁴

159
- 0001188118
- (1999) J. Appl. Phys. , vol.86 , pp. 3988
- Schwarz-Selinger, T.¹ Von Keudell, A.² Jacob, W.³

160
- 0040878740
- (1995) Surf. Sci. Rep. , vol.22 , pp. 249
- Küppers, J.¹

161
- 0001539466
- (1990) J. Appl. Phys. , vol.68 , pp. 6393
- Goodwin, D.¹ Gavillet, G.²

162
- 0007915935
- in press
- J. Chem. Phys.
- Meier, M.¹ Von Keudell, A.²

163
- 0000271626
- (1984) Phys. Rev. B , vol.30 , pp. 4713
- Fink, J.¹ Mueller-Heinzerling, T.² Pfluger, J.³ Scheerer, B.⁴ Koidl, P.⁵ Bubenzer, B.⁶ Sah, R.⁷

164
- 0032074699
- (1998) J. Electrochem. Soc. , vol.145 , pp. 1649
- Grill, A.¹ Patel, V.² Jahnes, C.³

165
- 0032800964
- (1999) J. Nucl. Mater. , vol.264 , pp. 56
- Maruyama, K.¹ Jacob, W.² Roth, J.³

166
- 0000186877
- Graphite (c)
- E.D. Palik (Ed.), Academic Press, San Diego, CA, USA
- (1979) Handbook of Optical Constants of Solids II , pp. 449
- Borghesi, A.¹ Guizetti, G.²

167
- 0000287305
- (1994) Chem. Phys. Lett. , vol.231 , pp. 193
- Horn, A.¹ Schenk, A.² Biener, J.³ Winter, B.⁴ Lutterloh, C.⁵ Wittmann, M.⁶ Küppers, J.⁷

168
- 0029735108
- (1996) J. Nucl. Mater. , vol.227 , pp. 186
- Wittmann, M.¹ Küppers, J.²

169
- 0007911176
- Elsevier, Amsterdam
- (1991) Applications of Diamond , pp. 453
- Schäfer, L.¹ Sattler, M.² Klages, C.³

170
- 0003143722
- (2000) Appl. Phys. Lett. , vol.76 , pp. 676
- Von Keudell, A.¹ Schwarz-Selinger, T.² Meier, M.³ Jacob, W.⁴

171
- 0001344845
- (2001) J. Appl. Phys. , vol.89 , pp. 2979
- Von Keudell, A.¹ Schwarz-Selinger, T.² Jacob, W.³

172
- 0000900173
- (1994) Phys. Rev. B , vol.49 , pp. 4948
- Alfonso, D.¹ Ulloa, S.² Brenner, D.³

173
- 0001700105
- (1996) Chem. Rev. , vol.96 , pp. 1327
- Garrison, B.¹ Kodali, P.² Srivastava, D.³

174
- 0034670707
- (2000) Phys. Rev. B , vol.62 , pp. 16995
- Tamura, H.¹ Zhou, H.² Hirano, Y.³ Takami, S.⁴ Kubo, M.⁵ Belosludov, R.⁶ Miyamoto, A.⁷ Imamura, A.⁸ Gamo, M.⁹ Ando, T.¹⁰

175
- 0001453870
- (1998) Phys. Rev. B , vol.57 , pp. 9965
- Kaukonen, M.¹ Sitch, P.² Jungnickel, G.³ Nieminen, R.⁴ Poykko, S.⁵ Porezag, D.⁶ Frauenheim, T.⁷

176
- 0007961120
- 2000
- Salonen, E.¹ Nordlund, K.²

177
- 0000936247
- (1996) J. Chem. Phys. , vol.104 , pp. 5997
- Dawnkaski, E.¹ Srivastava, D.² Garrison, B.³

178
- 0008000948
- (1992) J. Appl. Phys. , vol.75 , pp. 43
- Mutsuruka, N.¹ Inoue, S.² Machi, Y.³

179
- 0029293625
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 2163
- Möller, W.¹ Fukarek, W.² Lange, K.³ Von Keudell, A.⁴ Jacob, W.⁵

180
- 36449007906
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1322
- Von Keudell, A.¹ Jacob, W.² Fukarek, W.³

181
- 0007955815
- (1997) J. Appl. Phys. , vol.81 , pp. 1631
- Von Keudell, A.¹ Jacob, W.²

182
- 0001605041
- Strasbourg
- (1987) Proceedings of the E-MRS Symposium , vol.17 , pp. 137
- Wild, C.¹ Koidl, P.² Wagner, J.³

183
- 0000723288
- (1999) Appl. Phys. Lett. , vol.74 , pp. 2927
- De Graaf, A.¹ Van Hest, M.² Van de Sanden, M.³ Letourneur, K.⁴ Schram, D.⁵

184
- 0035277091
- (2001) J. Nucl. Mater. , vol.290 , pp. 224
- Coad, J.¹ Bekris, N.² Elder, J.³ Erents, S.⁴ Hole, D.⁵ Lawson, K.⁶ Matthews, G.⁷ Penzhorn, R.⁸ Stangeby, P.⁹

185
- 0007911177
- 1998
- Zecho, T.¹

186
- 4243340370
- (2001) J. Nucl. Mater. , vol.290 , pp. 381
- Mayer, M.¹ Phillips, V.² Wienhold, P.³ Esser, H.⁴ Von Seggern, J.⁵ Rubel, M.⁶

187
- 0035276405
- (2001) J. Nucl. Mater. , vol.290 , pp. 260
- Federici, G.¹ Brooks, J.² Coster, D.³ Janeschitz, G.⁴ Kukuskhin, A.⁵ Loarte, A.⁶ Pacher, H.⁷ Stober, J.⁸ Wu, C.⁹

188
- 0035277910
- (2001) J. Nucl. Mater. , vol.290 , pp. 231
- Von Keudell, A.¹ Schwarz-Selinger, T.² Jacob, W.³ Stevens, A.⁴

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