Novel low k dielectrics based on diamondlike carbon materials

Journal of the Electrochemical Society

Volumn 145, Issue 5, 1998, Pages 1649-1653

  Grill, A ^a,b   Patel, V ^a   Jahnes, C ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b ELECTROCHEMICAL SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DEPOSITION; DIAMOND FILMS; HYDROGENATION; PERMITTIVITY; RESIDUAL STRESSES; THERMAL STRESS; THERMODYNAMIC STABILITY; ULSI CIRCUITS;

DIAMONDLIKE CARBON FILMS;

DIELECTRIC FILMS;

EID: 0032074699     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838531     Document Type: Article

References (10)

1. P. Singer, Semicond. Int., 18(2), 88 (1996).
2. H. Kudo, R. Shinohara, and Y. Yamada, Mater. Res. Soc. Proc., 381, 105 (1995).
3. K. Endo and T. Tatsumi, Mater. Res. Soc. Proc., 381, 249 (1995).
4. Y. Matsubara, K. Endo, T. Tatsumi, H. Ueno, K. Sugai, and T. Horiuchi, Tech. Dig. Int. Electron Devices Meet, 369 (1996).
5. J. P. Sulivan, T. A. Friedmann, C. A. Apblett, M. P. Siegal, N. Missert, M. L. Lovejoy, P. B. Mirkarimi, and K. F. McCarty, Mater. Res. Soc. Proc., 381, 273 (1995).
6. A. Grill, V. Patel, and S. Cohen, Diamond Relat. Mater., 3, 281 (1994).
7. A. Grill, V. Patel, K. L. Saenger, C. Jahnes, S. A. Cohen, A. G. Schrott, D. C. Edelstein, and J. R. Paraszczak, Mater. Soc. Symp. Proc., 443, 155 (1997).
8. A Grill and V. Patel, Diamond Relat. Mater., 2, 1519 (1993).
9. A. Grill and B. S. Meyerson, in Synthetic Diamond: Emerging CVD Science and Technology, K. E. Spear and J. P. Dismukes, Editors, p. 91, John Wiley & Sons, Inc., New York (1994).
10. C. Donnet, J. Fontaine, M. Belin, A. Grill, V. Patel, and C. Jahnes, Surf. Coat. Technol., 94-95, 531 (1997).