Direct identification of the synergism between methyl radicals and atomic hydrogen during growth of amorphous hydrogenated carbon films

Applied Physics Letters

Volumn 76, Issue 6, 2000, Pages 676-678

  Von Keudell, A ^a   Schwarz Selinger, T ^a   Meier, M ^a   Jacob, W ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003143722     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125858     Document Type: Article

References (18)

1. W. Jacob, Thin Solid Films 326, 1 (1998).
2. W. Möller, W. Fukarek, K. Lange, A. von Keudell, and W. Jacob, Jpn. J. Appl. Phys., Part 1 34, 2163 (1995).
3. P. Pecher and W. Jacob, Appl. Phys. Lett. 73, 31 (1998).
4. H. Sugai, H. Kojima, A. Ishida, and H. Toyoda, Appl. Phys. Lett. 56, 2616 (1990).
5. S. J. Harris, Appl. Phys. Lett. 56, 2298 (1990).
6. M. Frenklach, S. Sokokov, and B. Weiner, Nature (London) 372, 534 (1994).
7. S. J. Harris and D. G. Goodwin, J. Phys. Chem. 97, 23 (1993).
8. B. J. Garrision, E. J. Dawnkaski, D. Srivastava, and D. W. Brenner, Science 255, 835 (1992).
9. J. Küppers, Surf. Sci. Rep. 22, 249 (1995).
10. A. Horn, T. Kammler, and M. Kappel, German Patent No. DE 197 57 851 C1 filed (1997).
11. T. Schwarz-Selinger, A. von Keudell, and W. Jacob (unpublished).
12. M. Remmler, B. Ondruschka, and G. Zimmermann, J. Prakt. Chem. 327, 868 (1985).
13. T. Schwarz-Selinger, W. Jacob, and A. von Keudell (unpublished).
14. D. Boutard, W. Möller, and B. M. U. Scherzer, Phys. Rev. B 38, 2988 (1988).
15. D. Boutard, B. M. U. Scherzer, and W. Möller, J. Appl. Phys. 65, 3833 (1989).
16. R. W. Collins, Rev. Sci. Instrum. 60, 3212 (1989).
17. A. von Keudell and W. Jacob, J. Appl. Phys. 79, 1092 (1996).
18. T. Schwarz-Selinger, A. von Keudell, and W. Jacob, J. Appl. Phys. 86, 1 (1999).