Growth and erosion of hydrocarbon films investigated by in situ ellipsometry

Journal of Applied Physics

Volumn 79, Issue 2, 1996, Pages 1092-1098

  Von Keudell, A ^a   Jacob, W ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000335922     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.360796     Document Type: Article

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