Surface loss probabilities of hydrocarbon radicals on amorphous hydrogenated carbon film surfaces

Journal of Applied Physics

Volumn 87, Issue 6, 2000, Pages 2719-2725

  Hopf, C ^a   Schwarz Selinger, T ^a   Jacob, W ^a   Von Keudell, A ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001276268     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372246     Document Type: Article

References (22)

1. J. C. Angus, P. Koidl, and S. Domitz, in Plasma Deposited Thin Films, edited by J. Mort and F. Jansen (CRC, Boca Raton, FL, 1986), p. 89.
2. W. Jacob, Thin Solid Films 326, 1 (1998).
3. G. Federici et al., Fusion Eng. Des. 39-40, 445 (1998).
4. A. von Keudell and W. Möller, J. Appl. Phys. 75, 7718 (1994).
5. W. Möller, W. Fukarek, K. Lange, A. von Keudell, and W. Jacob, Jpn. J. Appl. Phys., Part 1 34, 2163 (1995).
6. W. Eckstein, Computer Simulation of Ion Solid Interactions, Springer Series in Materials Science, Vol. 10 (Springer, Berlin, Heidelberg, 1991).
7. C. Hopf, K. Letourneur, W. Jacob, T. Schwarz-Selinger, and A. von Keudell, Appl. Phys. Lett. 74, 3800 (1999).
8. A. von Keudell, C. Hopf, T. Schwarz-Selinger, and W. Jacob, Nucl. Fusion (in print).
9. J. Perrin, Y. Takeda, H. Hirano, Y. Takeuchi, and A. Matsuda, Surf. Sci. 210, 114 (1989).
10. A. Matsuda, K. Nomoto, Y. Takeuchi, A. Suzuki, A. Yuuki, and J. Perrin, Surf. Sci. 227, 50 (1990).
11. D. A. Doughty, J. R. Doyle, G. H. Lin, and A. Gallagher, J. Appl. Phys. 67, 6220 (1990).
12. A. Nurrudin, J. R. Doyle, and J. R. Abelson, J. Appl. Phys. 76, 3123 (1994).
13. A. von Keudell and W. Jacob, J. Appl. Phys. 79, 1092 (1996).
14. E. Gogolides, D. Mary, A. Rhallabi, and G. Turban, Jpn. J. Appl. Phys., Part 1 34, 261 (1995).
15. W. Jacob, M. Engelhard, W. Möller, and A. Koch, Appl. Phys. Lett. 64, 971 (1994).
16. P. Pecher and W. Jacob, Appl. Phys. Lett. 73, 31 (1998).
17. M. Shiratani, J. Jolly, H. Videlot, and J. Perrin, Jpn. J. Appl. Phys., Part 1 36, 4752 (1997).
18. T. Schwarz-Selinger, A. von Keudell, and W. Jacob, J. Appl. Phys. 86, 1 (1999).
19. J. Küppers, Surf. Sci. Rep. 22, 249 (1995).
20. A. de Graaf, M. F. A. M. van Hest, M. C. M. van de Sanden, K. G. Y. Letourneur, and D. C. Schram, Appl. Phys. Lett. 74, 2927 (1999).
21. D. J. Dagel, C. M. Mallouris, and J. R. Doyle, J. Appl. Phys. 79, 8735 (1996).
22. J. Perrin, M. Shiratani, P. Kae-Nune, H. Videlot, J. Jolly, and J. Guillon, J. Vac. Sci. Technol. A 16, 278 (1998).