Determination of the absolute CH3 radical flux emanating from a methane electron cyclotron resonance plasma

Applied Physics Letters

Volumn 73, Issue 1, 1998, Pages 31-33

  Pecher, P ^a   Jacob, W ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003074110     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121713     Document Type: Article

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