Heterogeneous materials integration: Compliant substrates to active device and materials packaging

Materials Science and Engineering: B

Volumn 87, Issue 3, 2001, Pages 317-322

  Brown, A S ^a   Doolittle, W A ^a   Jokerst, N M ^a   Kang, S ^a   Huang, S ^a   Seo, S W ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Compliant substrates; Heterogeneous integration

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL LATTICES; EPITAXIAL GROWTH; MICROELECTRONICS; SUBSTRATES;

HETEROGENEOUS MATERIALS INTEGRATION;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0035915292     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(01)00730-9     Document Type: Article

References (41)