Compliant substrate technology: Status and prospects

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 2308-2312

  Brown, April S ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001662055     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590166     Document Type: Article

References (25)

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