Metastability modeling of compliant substrate critical thickness using experimental strain relief data

Applied Physics Letters

Volumn 71, Issue 10, 1997, Pages 1344-1346

  Carter Coman, Carrie ^a,b   Bicknell Tassius, Robert ^a,c,d   Brown, April S ^a   Jokerst, Nan Marie ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b HEWLETT PACKARD COMPANY   (United States)

^c GEORGIA TECH RESEARCH INSTITUTE   (United States)

^d CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001266440     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119889     Document Type: Article

References (15)

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