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Volumn 71, Issue , 2000, Pages 23-50

Point defect assisted diffusion in semiconductors

(1)  Dabrowski, J a  

a IHP   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN SOLIDS; HETEROJUNCTIONS; ION IMPLANTATION; SEMICONDUCTING BORON; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING;

EID: 0034465803     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article
Times cited : (12)

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