One- and two-dimensional characterization of power metal-oxide-semiconductor structure by spreading resistance profiling: From the profiles to the I-V curves

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 369-372

  Privitera, V ^a   Saggio, M G ^a   Magri A ^b  

^a CNR   (Italy)

^b CoRiMMe ^*  (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343686729     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588476     Document Type: Article

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