Ion-beam processing of silicon at keV energies: A molecular-dynamics study

Physical Review B - Condensed Matter and Materials Physics

Volumn 54, Issue 23, 1996, Pages 16683-16695

  Caturla, M ^a   Diaz de la Rubia T ^a   Marques L ^a   Gilmer, G ^b  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2842549240     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.54.16683     Document Type: Article

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