메뉴 건너뛰기




Volumn 23, Issue 10, 2015, Pages 1340-1352

DC-sputtered ZnO:Al as transparent conductive oxide for silicon heterojunction solar cells with μc-Si:H emitter

Author keywords

DC sputtering; high efficiency; Schottky contact; silicon heterojunction; ZnO:Al; c Si:H emitter

Indexed keywords

ALUMINUM OXIDE; COSTS; DEPOSITION; EFFICIENCY; HETEROJUNCTIONS; II-VI SEMICONDUCTORS; NANOCRYSTALLINE MATERIALS; OPTICAL FILMS; OXIDE MINERALS; SCHOTTKY BARRIER DIODES; SILICON WAFERS; TIN OXIDES; TRANSPARENT CONDUCTING OXIDES; ZINC OXIDE;

EID: 84941742355     PISSN: 10627995     EISSN: 1099159X     Source Type: Journal    
DOI: 10.1002/pip.2570     Document Type: Article
Times cited : (33)

References (61)
  • 5
    • 42649089136 scopus 로고    scopus 로고
    • Carrier transport in polycrystalline transparent conductive oxides: A comparative study of zinc oxide and indium oxide
    • Ellmer K, Mientus R,. Carrier transport in polycrystalline transparent conductive oxides: a comparative study of zinc oxide and indium oxide. Thin Solid Films 2008; 516 (14): 4620-4627. DOI: 10.1016/j.tsf.2007.05.084
    • (2008) Thin Solid Films , vol.516 , Issue.14 , pp. 4620-4627
    • Ellmer, K.1    Mientus, R.2
  • 6
    • 77955518761 scopus 로고    scopus 로고
    • Rf-Magnetron sputtered ITO thin films for improved heterojunction solar cell applications
    • Dao VA, Choi H, Heo J, Park H, Yoon K, Lee Y, Kim Y, Lakshminarayan N, Yi J,. rf-Magnetron sputtered ITO thin films for improved heterojunction solar cell applications. Current Applied Physics 2010; 10 (3): S506-S509. DOI: 10.1016/j.cap.2010.02.019
    • (2010) Current Applied Physics , vol.10 , Issue.3 , pp. S506-S509
    • Dao, V.A.1    Choi, H.2    Heo, J.3    Park, H.4    Yoon, K.5    Lee, Y.6    Kim, Y.7    Lakshminarayan, N.8    Yi, J.9
  • 7
    • 84868027450 scopus 로고    scopus 로고
    • High-efficiency silicon heterojunction solar cells: A review
    • DeWolf S, Descoeudres A, Holman ZC, Ballif C,. High-efficiency silicon heterojunction solar cells: a review. Green 2012; 2 (1): 7-24. DOI: 10.1515/green-2011-0018
    • (2012) Green , vol.2 , Issue.1 , pp. 7-24
    • DeWolf, S.1    Descoeudres, A.2    Holman, Z.C.3    Ballif, C.4
  • 8
    • 67650159730 scopus 로고    scopus 로고
    • Estimates of Te and in prices from direct mining of known ores
    • Green MA,. Estimates of Te and In prices from direct mining of known ores. Progress in Photovoltaics: Research and Applications 2009; 17 (5): 347-359. DOI: 10.1002/pip.899
    • (2009) Progress in Photovoltaics: Research and Applications , vol.17 , Issue.5 , pp. 347-359
    • Green, M.A.1
  • 12
    • 78751647815 scopus 로고    scopus 로고
    • Novel etching method on high rate ZnO:Al thin films reactively sputtered from dual tube metallic targets for silicon-based solar cells
    • Zhua H, Hüpkesa J, Buntea E, Owena J, Huang SM,. Novel etching method on high rate ZnO:Al thin films reactively sputtered from dual tube metallic targets for silicon-based solar cells. Solar Energy Materials and Solar Cells 2011; 95 (3): 964-968. DOI: 10.1016/j.solmat.2010.11.033
    • (2011) Solar Energy Materials and Solar Cells , vol.95 , Issue.3 , pp. 964-968
    • Zhua, H.1    Hüpkesa, J.2    Buntea, E.3    Owena, J.4    Huang, S.M.5
  • 15
    • 67349123346 scopus 로고    scopus 로고
    • Advances in a-Si:H/c-Si heterojunction solar cell fabrication and characterization
    • Korte L, Conrad E, Angermann H, Stangl R, Schmidt M,. Advances in a-Si:H/c-Si heterojunction solar cell fabrication and characterization. Solar Energy Materials and Solar Cells 2009; 93 (6): 905-910. DOI: 10.1016/j.solmat.2008.10.020
    • (2009) Solar Energy Materials and Solar Cells , vol.93 , Issue.6 , pp. 905-910
    • Korte, L.1    Conrad, E.2    Angermann, H.3    Stangl, R.4    Schmidt, M.5
  • 16
    • 0033703601 scopus 로고    scopus 로고
    • Recent aspects concerning DC reactive magnetron sputtering of thin films: A review
    • Safi I,. Recent aspects concerning DC reactive magnetron sputtering of thin films: a review. Surface and Coatings Technology 2000; 127 (2): 203-218. DOI: 10.1016/S0257-8972(00)00566-1
    • (2000) Surface and Coatings Technology , vol.127 , Issue.2 , pp. 203-218
    • Safi, I.1
  • 17
    • 34548846658 scopus 로고    scopus 로고
    • Large area ZnO:Al films with tailored light scattering properties for photovoltaic applications
    • Ruske F, Jacobs C, Sittinger V, Szyszka B, Werner W,. Large area ZnO:Al films with tailored light scattering properties for photovoltaic applications. Thin Solid Films 2007; 515 (24): 8695-8698. DOI: 10.1016/j.tsf.2007.03.107
    • (2007) Thin Solid Films , vol.515 , Issue.24 , pp. 8695-8698
    • Ruske, F.1    Jacobs, C.2    Sittinger, V.3    Szyszka, B.4    Werner, W.5
  • 18
    • 0039241173 scopus 로고
    • Determining height of a leaky Schottky barrier existing in the junction between SnO2 and a highly doped ptype amorphous SiC by using the pulsed laserinduced transient photopotential technique
    • Itoh K, Matsumoto H, Kobata T, Fujishima A, Nakamura O, Fukui K,. Determining height of a leaky Schottky barrier existing in the junction between SnO2 and a highly doped ptype amorphous SiC by using the pulsed laserinduced transient photopotential technique. Applied Physics Letters 1987; 51 (21): 1685-1686. DOI: 10.1063/1.98543
    • (1987) Applied Physics Letters , vol.51 , Issue.21 , pp. 1685-1686
    • Itoh, K.1    Matsumoto, H.2    Kobata, T.3    Fujishima, A.4    Nakamura, O.5    Fukui, K.6
  • 19
    • 84865517957 scopus 로고    scopus 로고
    • Improving the a-Si:H(p) rear emitter contact of n-type silicon solar cells
    • Bivour M, Reichel C, Hermle M, Glunz SW,. Improving the a-Si:H(p) rear emitter contact of n-type silicon solar cells. Solar Energy Materials and Solar Cells 2012; 106: 11-16. DOI: 10.1016/j.solmat.2012.06.036
    • (2012) Solar Energy Materials and Solar Cells , vol.106 , pp. 11-16
    • Bivour, M.1    Reichel, C.2    Hermle, M.3    Glunz, S.W.4
  • 20
    • 77949716644 scopus 로고    scopus 로고
    • Carrier transport and sensitivity issues in heterojunction with intrinsic thin layer solar cells on N-type crystalline silicon: A computer simulation study
    • Rahmouni M, Datta A, Chatterjee P, Damon-Lacoste J, Ballif C, Roca i Cabarrocas P,. Carrier transport and sensitivity issues in heterojunction with intrinsic thin layer solar cells on N-type crystalline silicon: a computer simulation study. Journal of Applied Physics 2010; 107 (5): 054521. DOI: 10.1063/1.3326945
    • (2010) Journal of Applied Physics , vol.107 , Issue.5 , pp. 054521
    • Rahmouni, M.1    Datta, A.2    Chatterjee, P.3    Damon-Lacoste, J.4    Ballif, C.5    Roca Cabarrocas, P.6
  • 21
    • 0037600573 scopus 로고    scopus 로고
    • Role of front contact work function on amorphous silicon/crystalline silicon heterojunction solar cell performance
    • Centurioni E, Iencinella D,. Role of front contact work function on amorphous silicon/crystalline silicon heterojunction solar cell performance. IEEE Electron Device Letters 2003; 24 (3): 177-179. DOI: 10.1109/LED.2003.811405
    • (2003) IEEE Electron Device Letters , vol.24 , Issue.3 , pp. 177-179
    • Centurioni, E.1    Iencinella, D.2
  • 22
    • 0032184505 scopus 로고    scopus 로고
    • Work function of transparent conducting multicomponent oxide thin films prepared by magnetron sputtering
    • Minami T, Miyata T, Yamamoto T,. Work function of transparent conducting multicomponent oxide thin films prepared by magnetron sputtering. Surface and Coatings Technology 1998; 108: 583-587. DOI: 10.1016/S0257-8972(98)00592-1
    • (1998) Surface and Coatings Technology , vol.108 , pp. 583-587
    • Minami, T.1    Miyata, T.2    Yamamoto, T.3
  • 23
    • 0021371798 scopus 로고
    • Electrical properties of n amorphous/p crystalline silicon heterojunctions
    • Matsuura H, Okuno T, Okushi H, Tanaka K,. Electrical properties of n amorphous/p crystalline silicon heterojunctions. Journal of Applied Physics 1984; 55 (4): 1012. DOI: 10.1063/1.333193
    • (1984) Journal of Applied Physics , vol.55 , Issue.4 , pp. 1012
    • Matsuura, H.1    Okuno, T.2    Okushi, H.3    Tanaka, K.4
  • 24
    • 79959422282 scopus 로고    scopus 로고
    • Transparent conducting oxides for photovoltaics: Manipulation of Fermi level, work function and energy band alignment
    • Klein A, Körber C, Wachau A, Säuberlich F, Gassenbauer Y, Harvey SP, Proffit DE, Mason TO,. Transparent conducting oxides for photovoltaics: manipulation of Fermi level, work function and energy band alignment. Materials 2010; 3 (11): 4892-4914. DOI: 10.3390/ma3114892
    • (2010) Materials , vol.3 , Issue.11 , pp. 4892-4914
    • Klein, A.1    Körber, C.2    Wachau, A.3    Säuberlich, F.4    Gassenbauer, Y.5    Harvey, S.P.6    Proffit, D.E.7    Mason, T.O.8
  • 27
    • 0019036131 scopus 로고
    • Parallel silicide contacts
    • Ohdomari I, Tu KN,. Parallel silicide contacts. Journal of Applied Physics 1980; 51 (7): 3735-3739. DOI: 10.1063/1.328160
    • (1980) Journal of Applied Physics , vol.51 , Issue.7 , pp. 3735-3739
    • Ohdomari, I.1    Tu, K.N.2
  • 28
    • 84878927342 scopus 로고    scopus 로고
    • Simulation of high efficiency silicon solar cells with a hetero-junction microcrystalline intrinsic thin layer
    • Vishkasougheh MH, Tunaboylu B,. Simulation of high efficiency silicon solar cells with a hetero-junction microcrystalline intrinsic thin layer. Energy Conversion and Management 2013; 72: 141-146. DOI: 10.1016/j.enconman.2012.10.025
    • (2013) Energy Conversion and Management , vol.72 , pp. 141-146
    • Vishkasougheh, M.H.1    Tunaboylu, B.2
  • 29
    • 84897851162 scopus 로고    scopus 로고
    • Enhanced passivation at amorphous/crystalline silicon interface and suppressed Schottky barrier by deposition of microcrystalline silicon emitter layer in silicon heterojunction solar cells
    • Madani Ghahfarokhi O, von Maydell K, Agert C,. Enhanced passivation at amorphous/crystalline silicon interface and suppressed Schottky barrier by deposition of microcrystalline silicon emitter layer in silicon heterojunction solar cells. Applied Physics Letters 2014; 104 (11): 113901. DOI: 10.1063/1.4868726
    • (2014) Applied Physics Letters , vol.104 , Issue.11 , pp. 113901
    • Madani Ghahfarokhi, O.1    Von Maydell, K.2    Agert, C.3
  • 30
    • 33745725539 scopus 로고    scopus 로고
    • Transparent conductive Al-doped ZnO films for liquid crystal displays
    • Oh BY, Jeong MC, Moon TH, Lee W, Myounga JM,. Transparent conductive Al-doped ZnO films for liquid crystal displays. Journal of Applied Physics 2006; 99 (12): 124505. DOI: 10.1063/1.2206417
    • (2006) Journal of Applied Physics , vol.99 , Issue.12 , pp. 124505
    • Oh, B.Y.1    Jeong, M.C.2    Moon, T.H.3    Lee, W.4    Myounga, J.M.5
  • 31
    • 79951855298 scopus 로고    scopus 로고
    • Boron-doped zinc oxide layers grown by metal-organic CVD for silicon heterojunction solar cells applications
    • Favier A, Munoz D, Martin de Nicolas S, Ribeyron PJ,. Boron-doped zinc oxide layers grown by metal-organic CVD for silicon heterojunction solar cells applications. Solar Energy Materials and Solar Cells 2011; 95 (4): 1057-1061. DOI: 10.1016/j.solmat.2010.11.013
    • (2011) Solar Energy Materials and Solar Cells , vol.95 , Issue.4 , pp. 1057-1061
    • Favier, A.1    Munoz, D.2    Martin De Nicolas, S.3    Ribeyron, P.J.4
  • 32
    • 67349219119 scopus 로고    scopus 로고
    • Passivation of textured substrates for a-Si:H/c-Si hetero-junction solar cells: Effect of wet-chemical smoothing and intrinsic a-Si:H interlaye
    • Angermann H, Conrad E, Korte L, Rappich J, Schulze TF, Schmidt M,. Passivation of textured substrates for a-Si:H/c-Si hetero-junction solar cells: Effect of wet-chemical smoothing and intrinsic a-Si:H interlaye. Materials Science and Engineering B 2009; 159: 219-223. DOI: 10.1016/j.mseb.2008.10.044
    • (2009) Materials Science and Engineering B , vol.159 , pp. 219-223
    • Angermann, H.1    Conrad, E.2    Korte, L.3    Rappich, J.4    Schulze, T.F.5    Schmidt, M.6
  • 33
    • 8144229832 scopus 로고    scopus 로고
    • Effects of substrate temperature on the properties of heavily Al-doped ZnO films by simultaneous R.F. And D.C. Magnetron sputtering
    • Lin SS, Huang JL, Sajgalik P,. Effects of substrate temperature on the properties of heavily Al-doped ZnO films by simultaneous r.f. and d.c. magnetron sputtering. Surface and Coatings Technology 2005; 190 (1): 39-47. DOI: 10.1016/j.surfcoat.2004.03.022
    • (2005) Surface and Coatings Technology , vol.190 , Issue.1 , pp. 39-47
    • Lin, S.S.1    Huang, J.L.2    Sajgalik, P.3
  • 34
    • 84859525982 scopus 로고    scopus 로고
    • Improved conductivity of aluminum-doped ZnO: The effect of hydrogen diffusion from a hydrogenated amorphous silicon capping layer
    • Ponomarev MV, Sharma K, Verheijen MA, van de Sanden MCM, Creatore M,. Improved conductivity of aluminum-doped ZnO: the effect of hydrogen diffusion from a hydrogenated amorphous silicon capping layer. Journal of Applied Physics 2012; 111 (6): 063715. DOI: 10.1063/1.3692439
    • (2012) Journal of Applied Physics , vol.111 , Issue.6 , pp. 063715
    • Ponomarev, M.V.1    Sharma, K.2    Verheijen, M.A.3    Van De Sanden, M.C.M.4    Creatore, M.5
  • 35
    • 33751507609 scopus 로고
    • Light trapping properties of pyramidally textured surfaces
    • Campbell P, Green MA,. Light trapping properties of pyramidally textured surfaces. Journal of Applied Physics 1987; 62 (1): 243-249. DOI: 10.1063/1.339189
    • (1987) Journal of Applied Physics , vol.62 , Issue.1 , pp. 243-249
    • Campbell, P.1    Green, M.A.2
  • 36
    • 0020091442 scopus 로고
    • Intensity enhancement in textured optical sheets for solar cells
    • Yablonovitch E, Cody GD,. Intensity enhancement in textured optical sheets for solar cells. IEEE Transactions on Electron Devices 1982; 29 (2): 300-305. DOI: 10.1109/T-ED.1982.20700
    • (1982) IEEE Transactions on Electron Devices , vol.29 , Issue.2 , pp. 300-305
    • Yablonovitch, E.1    Cody, G.D.2
  • 39
    • 78650697075 scopus 로고    scopus 로고
    • Kelvin force microscopy studies of work function of transparent conducting ZnO:Al electrodes synthesized under varying oxygen pressures
    • Jaramillo R, Ramanathan S,. Kelvin force microscopy studies of work function of transparent conducting ZnO:Al electrodes synthesized under varying oxygen pressures. Solar Energy Materials and Solar Cells 2011; 95 (2): 602-605. DOI: 10.1016/j.solmat.2010.09.025
    • (2011) Solar Energy Materials and Solar Cells , vol.95 , Issue.2 , pp. 602-605
    • Jaramillo, R.1    Ramanathan, S.2
  • 40
    • 36549099749 scopus 로고
    • 3 films: Basic optical properties and applications to energy-efficient windows
    • 3 films: basic optical properties and applications to energy-efficient windows. Journal of Applied Physics 1986; 60 (11): R123. DOI: 10.1063/1.337534
    • (1986) Journal of Applied Physics , vol.60 , Issue.11 , pp. R123
    • Hamberg, I.1    Granqvist, C.G.2
  • 41
    • 68649123161 scopus 로고    scopus 로고
    • Structural, defect and optical properties of ZnO films grown under various O2/Ar gas ratios
    • Hu Y, Chen YQ, Wu YC, Wang MJ, Fang GJ, He CQ, Wang SJ,. Structural, defect and optical properties of ZnO films grown under various O2/Ar gas ratios. Applied Surface Science 2009; 255 (22): 9279-9284. DOI: 10.1016/j.apsusc.2009.07.025
    • (2009) Applied Surface Science , vol.255 , Issue.22 , pp. 9279-9284
    • Hu, Y.1    Chen, Y.Q.2    Wu, Y.C.3    Wang, M.J.4    Fang, G.J.5    He, C.Q.6    Wang, S.J.7
  • 42
    • 0033170232 scopus 로고    scopus 로고
    • Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering
    • Szyszka B,. Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering. Thin Solid Films 1999; 351 (1): 164-169. DOI: 10.1016/S0040-6090(99)00158-3
    • (1999) Thin Solid Films , vol.351 , Issue.1 , pp. 164-169
    • Szyszka, B.1
  • 43
    • 25344459898 scopus 로고
    • UV resonant raman scattering in ZnO
    • Scott JF,. UV resonant raman scattering in ZnO. Physical Review B 1970; 2 (4): 1209-1211. DOI: 10.1103/PhysRevB.2.1209
    • (1970) Physical Review B , vol.2 , Issue.4 , pp. 1209-1211
    • Scott, J.F.1
  • 44
    • 77950690734 scopus 로고    scopus 로고
    • Oxygen influence on sputtered high rate ZnO:Al films from dual rotatable ceramic targets
    • Zhu H, Hüpkes J, Bunte E, Huang SM,. Oxygen influence on sputtered high rate ZnO:Al films from dual rotatable ceramic targets. Applied Surface Science 2010; 256 (14): 4601-4605. DOI: 10.1016/j.apsusc.2010.02.057
    • (2010) Applied Surface Science , vol.256 , Issue.14 , pp. 4601-4605
    • Zhu, H.1    Hüpkes, J.2    Bunte, E.3    Huang, S.M.4
  • 45
    • 36149009161 scopus 로고
    • Theory of photoconductivity in semiconductor films
    • Petritz RL,. Theory of photoconductivity in semiconductor films. Physical Review 1956; 104 (6): 1508-1516. DOI: 10.1103/PhysRev.104.1508
    • (1956) Physical Review , vol.104 , Issue.6 , pp. 1508-1516
    • Petritz, R.L.1
  • 46
    • 84857851749 scopus 로고    scopus 로고
    • Reactive magnetron sputtering of transparent conductive oxide thin films: Role of energetic particle (ion) bombardment
    • Ellmer K, Welzel T,. Reactive magnetron sputtering of transparent conductive oxide thin films: role of energetic particle (ion) bombardment. Journal of Materials Research 2012; 27 (5): 765-779. DOI: 10.1557/jmr.2011.428
    • (2012) Journal of Materials Research , vol.27 , Issue.5 , pp. 765-779
    • Ellmer, K.1    Welzel, T.2
  • 47
    • 79959807802 scopus 로고    scopus 로고
    • The influence of the target age on laterally resolved ion distributions in reactive planar magnetron sputtering
    • Welzel T, Ellmer K,. The influence of the target age on laterally resolved ion distributions in reactive planar magnetron sputtering. Surface and Coatings Technology 2011; 205 (2): S294-S298. DOI: 10.1016/j.surfcoat.2011.01.050
    • (2011) Surface and Coatings Technology , vol.205 , Issue.2 , pp. S294-S298
    • Welzel, T.1    Ellmer, K.2
  • 48
    • 0018483699 scopus 로고
    • Radiation damage in silicon dioxide films exposed to reactive ion etching
    • DiMaria DJ, Ephrath LM, Young DR,. Radiation damage in silicon dioxide films exposed to reactive ion etching. Journal of Applied Physics 1979; 50 (6): 4015-4021. DOI: 10.1063/1.326481
    • (1979) Journal of Applied Physics , vol.50 , Issue.6 , pp. 4015-4021
    • DiMaria, D.J.1    Ephrath, L.M.2    Young, D.R.3
  • 50
    • 84868031186 scopus 로고    scopus 로고
    • Damage at hydrogenated amorphous/crystalline silicon interfaces by indium tin oxide overlayer sputtering
    • Demaurex B, De Wolf S, Descoeudres A, Holman Z, Ballif C,. Damage at hydrogenated amorphous/crystalline silicon interfaces by indium tin oxide overlayer sputtering. Applied Physics Letters 2012; 101 (17); 171604. DOI: 10.1063/1.4764529
    • (2012) Applied Physics Letters , vol.101 , Issue.17 , pp. 171604
    • Demaurex, B.1    De Wolf, S.2    Descoeudres, A.3    Holman, Z.4    Ballif, C.5
  • 51
    • 80052083897 scopus 로고    scopus 로고
    • Influence of ITO deposition and post annealing on HIT solar cell structures
    • Zhanga D, Tavakoliyarakia A, Wub Y, van Swaaija RACMM, Zemana M,. Influence of ITO deposition and post annealing on HIT solar cell structures. Energy Procedia 2011; 8: 207-213. DOI: 10.1016/j.egypro.2011.06.125
    • (2011) Energy Procedia , vol.8 , pp. 207-213
    • Zhanga, D.1    Tavakoliyarakia, A.2    Wub, Y.3    Van Swaaija, R.4    Zemana, M.5
  • 52
    • 84889685157 scopus 로고    scopus 로고
    • Study of surface passivation of CZ c-Si by PECVD a-Si:H films; A comparison between quasi-steady-state and transient photoconductance decay measurement
    • Madani Ghahfarokhi O, von Maydella K, Agert C,. Study of surface passivation of CZ c-Si by PECVD a-Si:H films; a comparison between quasi-steady-state and transient photoconductance decay measurement. In Proceedings of MRS Spring Meeting, San Francisco 2013; 1536. DOI: 10.1557/opl.2013.614
    • (2013) Proceedings of MRS Spring Meeting, San Francisco , pp. 1536
    • Madani Ghahfarokhi, O.1    Von Maydella, K.2    Agert, C.3
  • 53
    • 34247334113 scopus 로고    scopus 로고
    • Structural, electrical and optical properties of ZnO:Al films deposited on flexible organic substrates for solar cell applications
    • Lee J, Lee D, Lim D, Yang K,. Structural, electrical and optical properties of ZnO:Al films deposited on flexible organic substrates for solar cell applications. Thin Solid Films 2007; 515 (15): 6094-6098. DOI: 10.1016/j.tsf.2006.12.099
    • (2007) Thin Solid Films , vol.515 , Issue.15 , pp. 6094-6098
    • Lee, J.1    Lee, D.2    Lim, D.3    Yang, K.4
  • 54
    • 0000170470 scopus 로고    scopus 로고
    • Thermal power at a substrate during ZnO:Al thin film deposition in a planar magnetron sputtering system
    • Wendt R, Ellmer K, Wiesemann K,. Thermal power at a substrate during ZnO:Al thin film deposition in a planar magnetron sputtering system. Journal of Applied Physics 1997; 82 (5): 2115-2122. DOI: 10.1063/1.366092
    • (1997) Journal of Applied Physics , vol.82 , Issue.5 , pp. 2115-2122
    • Wendt, R.1    Ellmer, K.2    Wiesemann, K.3
  • 55
    • 0033889468 scopus 로고    scopus 로고
    • Studying of transparent conductive ZnO:Al thin films by RF reactive magnetron sputtering
    • Chang JF, Wang HL, Hon MH,. Studying of transparent conductive ZnO:Al thin films by RF reactive magnetron sputtering. Journal of Crystal Growth 2000; 211 (1-4): 93-97. DOI: 10.1016/S0022-0248(99)00779-4
    • (2000) Journal of Crystal Growth , vol.211 , Issue.14 , pp. 93-97
    • Chang, J.F.1    Wang, H.L.2    Hon, M.H.3
  • 56
    • 33747390062 scopus 로고    scopus 로고
    • The role of plasma induced substrate heating during high rate deposition of microcrystalline silicon solar cells
    • van den Donker MN, Schmitz R, Appenzeller W, Rech B, Kessels WMM, van de Sanden MCM,. The role of plasma induced substrate heating during high rate deposition of microcrystalline silicon solar cells. Thin Solid Films 2006; 511-512: 562-566. DOI: 10.1016/j.tsf.2005.12.167
    • (2006) Thin Solid Films , vol.511-512 , pp. 562-566
    • Van Den Donker, M.N.1    Schmitz, R.2    Appenzeller, W.3    Rech, B.4    Kessels, W.M.M.5    Van De Sanden, M.C.M.6
  • 57
    • 0000876821 scopus 로고
    • Substrate temperature dependence of transparent conducting Al-doped ZnO thin films prepared by magnetron sputtering
    • Minami T, Sato H, Imamoto H, Takata S,. Substrate temperature dependence of transparent conducting Al-doped ZnO thin films prepared by magnetron sputtering. Japanese Journal of Applied Physics 1992; 31: L257-L260. DOI: 10.1143/JJAP.31.L257
    • (1992) Japanese Journal of Applied Physics , vol.31 , pp. L257-L260
    • Minami, T.1    Sato, H.2    Imamoto, H.3    Takata, S.4
  • 60
    • 84919433287 scopus 로고    scopus 로고
    • Hydrogenated amorphous silicon thin films as passivation layers deposited by microwave remote-PECVD for heterojunction solar cells
    • Jeon MS, Kamisako K,. Hydrogenated amorphous silicon thin films as passivation layers deposited by microwave remote-PECVD for heterojunction solar cells. Transactions on Electrical and Electronic Materials 2009; 10 (3): 75-79.
    • (2009) Transactions on Electrical and Electronic Materials , vol.10 , Issue.3 , pp. 75-79
    • Jeon, M.S.1    Kamisako, K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.