Surface textured MF-sputtered ZnO films for microcrystalline silicon-based thin-film solar cells

Solar Energy Materials and Solar Cells

Volumn 90, Issue 18-19, 2006, Pages 3054-3060

  Hupkes J ^a   Rech, B ^a   Kluth, O ^a   Repmann, T ^a   Zwaygardt, B ^a   Muller J ^a   Drese, R ^b   Wuttig, M ^b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Reactive sputtering; Silicon; Solar cells; Thin film; Zinc oxide

Indexed keywords

CRYSTALLINE MATERIALS; ETCHING; LIGHT SCATTERING; MAGNETRON SPUTTERING; SILICON SOLAR CELLS; ZINC OXIDE;

CHEMICAL ETCHING; DEPOSITION PRESSURE; REACTIVE SPUTTERING; THIN FILM SOLAR CELLS;

THIN FILMS;

EID: 33748302820     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2006.06.027     Document Type: Article

References (11)

1. Rech B., Kluth O., Repmann T., Springer J., Müller J., Finger F., Stiebig H., and Wagner H. Sol. Energy Mater. Sol. Cells 74 (2002) 439
2. Szyszka B. Thin Solid Films 351 (1999) 164
3. Müller J., Schöpe G., Kluth O., Sittinger V., Szyszka B., Geyer R., Lechner P., Schade H., Ruske M., Dittmar G., and Bochem H.-P. Thin Solid Films 442 (2003) 158
4. J. Strümpfel, G. Beister, D. Schulze, M. Kammer, S. Rehn, in: 40th Annual Technical Conference of the Society of Vacuum Coaters, New Orleans, USA, April 12-17, 1997, p. 179.
5. T. Repmann, B. Sehrbrock, Ch. Zahren, H. Siekmann, B. Rech, this conference.
6. Agashe C., Kluth O., Schöpe G., Siekmann H., Hüpkes J., and Rech B. Thin Solid Films 442 (2003) 167
7. Kluth O., Schöpe G., Hüpkes J., Agashe C., Müller J., and Rech B. Thin Solid Films 442 (2003) 80
8. Kluth O., Rech B., Houben L., Wieder S., Schöpe G., Beneking C., Wagner H., Löffl A., and Schock H.W. Thin Solid Films 351 (1999) 247
9. Kappertz O., Drese R., and Wuttig M. J. Vac. Sci. Technol. A 20 (2002) 2084
10. Thornton J.A. J. Vac. Sci. Technol. 11 (1974) 666
11. Thornton J.A. Annu. Rev. Mater. Sci. 7 (1977) 239