Rf-Magnetron sputtered ITO thin films for improved heterojunction solar cell applications

Current Applied Physics

Volumn 10, Issue SUPPL. 3, 2010, Pages

  Dao, Vinh Ai ^a   Choi, Hyungwook ^a   Heo, Jongkyu ^a   Park, Hyeongsik ^a   Yoon, Kichan ^a   Lee, Youngseok ^a   Kim, Yongkuk ^a   Lakshminarayan, Nariangadu ^b   Yi, Junsin ^a  

^a Sungkyunkwan University   (South Korea)

^b MADRAS CHRISTIAN COLLEGE   (India)

Author keywords

Heterojunction solar cells; Indium tin oxide; RF Sputtering; Substrate temperature

Indexed keywords

ADATOM MOBILITIES; ANTI-REFLECTION; DEVICE PERFORMANCE; DIFFERENT SUBSTRATES; EMITTER LAYERS; FIGURE OF MERIT; FILM DEPOSITION; HETEROJUNCTION SOLAR CELLS; HIGH TRANSMITTANCE; HYDROGEN EFFUSION; INDIUM TIN OXIDE; INDIUM TIN OXIDE FILMS; IONS BOMBARDMENT; ITO FILMS; ITO THIN FILMS; LOW RESISTIVITY; PERFORMANCE OF DEVICES; PHOTO-VOLTAGE; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-SPUTTERING; THERMALLY INDUCED; XRD;

CARRIER CONCENTRATION; GALVANOMAGNETIC EFFECTS; HALL MOBILITY; HETEROJUNCTIONS; INDIUM; ION BOMBARDMENT; OXIDE FILMS; PHOTOLITHOGRAPHY; SOLAR CELLS; SUBSTRATES; TIN; TITANIUM COMPOUNDS;

ITO GLASS;

EID: 77955518761     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2010.02.019     Document Type: Conference Paper

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