SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium Proceedings

Volumn 1536, Issue , 2013, Pages 187-192

Study of surface passivation of CZ c-Si by PECVD a-Si:H films; a comparison between quasi-steady-state and transient photoconductance decay measurement

(3) Ghahfarokhi, Omid Madani a Von Maydell, Karsten a Agert, Carsten a

a UNIVERSITY OF OLDENBURG (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION PARAMETERS; EFFECTIVE LIFETIME; HYDROGENATED AMORPHOUS SILICON (A-SI:H); MINORITY CARRIER LIFETIMES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITIONS (PE CVD); RECOMBINATION RATE; SURFACE PASSIVATION; TRANSIENT PHOTOCONDUCTANCE DECAYS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON;

SILICON WAFERS;

EID: 84889685157 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/opl.2013.614 Document Type: Conference Paper

Times cited : (1)

References (13)

1
- 0000513411
- R. Sinton and A. Cuevas, Appl. Phys. Lett. 69, 2510 (1996).
- (1996) Appl. Phys. Lett. , vol.69 , pp. 2510
- Sinton, R.¹ Cuevas, A.²

2
- 0000612857
- H. Nagel, C. Berge and A. G. Aberle, J. Appl. Phys. 86, 6218 (1999).
- (1999) J. Appl. Phys. , vol.86 , pp. 6218
- Nagel, H.¹ Berge, C.² Aberle, A.G.³

3
- 0033356030
- J. Schmidt, IEEE Trans. Electron. Dev. 46, 2018 (1999)
- (1999) IEEE Trans. Electron. Dev. , vol.46 , pp. 2018
- Schmidt, J.¹

4
- 34547093404
- S. Olibet, E. V. Sauvain and C. Ballif, Phys. Rev. B 76, 035326 (2007).
- (2007) Phys. Rev. B , vol.76 , pp. 035326
- Olibet, S.¹ Sauvain, E.V.² Ballif, C.³

5
- 33846632881
- S. De Wolf and M. Kondo, J. Appl. Phys. 90, 042111 (2007).
- (2007) J. Appl. Phys. , vol.90 , pp. 042111
- De Wolf, S.¹ Kondo, M.²

6
- 78649264201
- A. Descoeudres, L. Barraud, R. Bartlome, G. Choong, Stefaan De Wolf, F. Zicarelli, C. Ballif, Appl. Phys. Lett. 97, 183505 (2010).
- (2010) Appl. Phys. Lett. , vol.97 , pp. 183505
- Descoeudres, A.¹ Barraud, L.² Bartlome, R.³ Choong, G.⁴ De Wolf, S.⁵ Zicarelli, F.⁶ Ballif, C.⁷

7
- 46449098325
- M. Z. Burrows, U. K. Das, R. L. Opila, S. De Wolf and R. W.Birkmire, J. Vac. Sci. Technol. A 26(4), 683 (2008).
- (2008) J. Vac. Sci. Technol. A , vol.26 , Issue.4 , pp. 683
- Burrows, M.Z.¹ Das, U.K.² Opila, R.L.³ De Wolf, S.⁴ Birkmire, R.W.⁵

8
- 25744447635
- R. A. Street, Phys. Rev. B 43, 2454 (1991).
- (1991) Phys. Rev. B , vol.43 , pp. 2454
- Street, R.A.¹

9
- 77954057887
- T. F. Schulze, H. N. Beushausen, C. Leendertz, A. Dobrich, B. Rech and L. Korte. Appl. Phys. Lett. 96, 252102 (2010).
- (2010) Appl. Phys. Lett. , vol.96 , pp. 252102
- Schulze, T.F.¹ Beushausen, H.N.² Leendertz, C.³ Dobrich, A.⁴ Rech, B.⁵ Korte, L.⁶

10
- 45949089561
- M. S. Jeon, K. Kawachi, P. Supajariyawichai, M. Dhamrin and K.Kamisako, e-J. Surf. Sci. Nanotech. 6, 124 (2008).
- (2008) E-J. Surf. Sci. Nanotech. , vol.6 , pp. 124
- Jeon, M.S.¹ Kawachi, K.² Supajariyawichai, P.³ Dhamrin, M.⁴ Kamisako, K.⁵

11
- 0038107224
- A. Matsuda, M. Takai, T. Nishimoto, M. Kondo, Sol. Energ. Mat. Sol. Cells 78, 3 (2003).
- (2003) Sol. Energ. Mat. Sol. Cells , vol.78 , pp. 3
- Matsuda, A.¹ Takai, M.² Nishimoto, T.³ Kondo, M.⁴

12
- 35949039833
- D. K. Biegelsen, R. A. Street, C. C. Tsai, and J. C. Knight, Phys. Rev. B 20, 4839 (1979).
- (1979) Phys. Rev. B , vol.20 , pp. 4839
- Biegelsen, D.K.¹ Street, R.A.² Tsai, C.C.³ Knight, J.C.⁴

13
- 84926891046
- J. Hubin, A. V. Shah and E. Sauvain. Philosophical Magazine Letters 66, 115 (1992).
- (1992) Philosophical Magazine Letters , vol.66 , pp. 115
- Hubin, J.¹ Shah, A.V.² Sauvain, E.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.