Work function of transparent conducting multicomponent oxide thin films prepared by magnetron sputtering

Surface and Coatings Technology

Volumn 108-109, Issue , 1998, Pages 583-587

  Minami, Tadatsugu ^a   Miyata, Toshihiro ^a   Yamamoto, Takashi ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Magnetron sputtering; Metal oxide; Transparent conducting oxide film; Transparent electrode; Work function

Indexed keywords

ELECTRODES; FILM PREPARATION; MAGNETRON SPUTTERING; OXIDES; PHOTOELECTRON SPECTROSCOPY; THIN FILMS; TRANSPARENCY; ULTRAVIOLET SPECTROSCOPY;

TRANSPARENT CONDUCTING MULTICOMPONENT OXIDE (TCO) FILMS; WORK FUNCTION;

CONDUCTIVE FILMS;

EID: 0032184505     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00592-1     Document Type: Article

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