Integration of scheduling and advanced process control in semiconductor manufacturing: Review and outlook

IEEE International Conference on Automation Science and Engineering

Volumn 2014-January, Issue , 2014, Pages 93-98

  Yugma, Claude ^a   Blue, Jakey ^a   Dauzere Pérès, Stéphane ^a   Vialletelle, Philippe ^b  

^a ECOLE DES MINES DE SAINT ETIENNE   (France)

^b STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ENGINEERING RESEARCH; INDUSTRIAL RESEARCH; INTELLIGENT CONTROL; MANUFACTURE; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

ADVANCED PROCESS CONTROL; EXPECTED IMPROVEMENTS; FABRICATION TECHNIQUE; INDUSTRIAL PRACTICES; PRODUCTION PERFORMANCE; SCHEDULING AND CONTROLS; SCHEDULING OPTIMIZATION; SEMICONDUCTOR MANUFACTURING;

PROCESS CONTROL;

EID: 84939797052     PISSN: 21618070     EISSN: 21618089     Source Type: Conference Proceeding    
DOI: 10.1109/CoASE.2014.6899310     Document Type: Conference Paper

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