Making the move to fab-wide APC

Solid State Technology

Volumn 47, Issue 9, 2004, Pages 47-52

  Moyne, James ^a  

^a Brooks Automation Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCE PROCESS CONTROL (APC); CHEMICAL MECHANICAL PLANARISATION (CMP); FAULT DETECTION AND CLASSIFICATION (FDC); PROCESS CONTROL SYSTEM;

ALGORITHMS; ETCHING; INDUSTRIAL PLANTS; LITHOGRAPHY; MAINTENANCE; SEMICONDUCTOR DEVICE MANUFACTURE; TECHNOLOGY TRANSFER; WSI CIRCUITS;

PROCESS CONTROL;

EID: 4944220727     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Review

References (13)

1. L. Peters, "APC is Gaining Widespread Adoption," Semiconductor International, Dec. 2001.
2. M. Liu, "APC from the Foundry Perspective" (keynote address), Proc. AEC/APC Symposium XIV, Sept. 2003.
3. J. Moyne, E. del Castillo, A. Hurwitz, Run-to-run Control in Semiconductor Manufacturing, CRC Press, 2000.
4. C. El Chemali, J. Moyne, K. Khan, J. Colt, J. Chapple-Sokol, et al., "Multi-zone Uniformity Control of a CMP Process Utilizing a Pre and Post-Measurement Strategy," J. American Vacuum Soc., June/July 2000.
5. Proc. AEC/APC Symposium XIV, Sept. 2003.
6. C.A. Bode, T.J. Sonderman, "Controlling the Margins in 300mm Manufacturing," Solid State Technology, pp. 49-52, Feb. 2004.
7. International Technology Roadmap for Semiconductors, 2003 edition, Semiconductor Industry Association, available at http://public.itrs.net.
8. SEMI E133: Provisional Standard for Automated Process Control Systems Interface, Semiconductor Equipment and Materials International, April 2004.
9. J. Mullins, J. Zou, "Frequency Domain Stability and Performance Analysis of Moving Average Run-to-Run Controllers," Proc. AEC/APC Symposium XIV, Sept. 2003.
10. J.S. Lin, P.H. Chen, S. Wu, F. Ko, M.S. Zhou, et al., "Model-based Wafer-to-Wafer Control for Cu CMP," VLSI Multilevel Interconnect Conf., Sept. 2003.
11. G. Cherry, J. Qin, "Multivariate Analysis for Semiconductor Fault Detection and Classification and Tool Performance Assessment," Texas-Wisconsin Modeling and Control Consortium, Feb. 2004.
12. J. Moyne, J. Korsakas, D. Tilbury, "Reconfigurable Factory Testbed (RFT): A Distributed Testbed for Reconfigurable Manufacturing Systems," Japan-USA Symposium on Flexible Automation, July 2004.
13. T. Stanley, et al. "Cost and Revenue Impact of Advanced Process Control (APC) with and Emphasis on Run-to-Run Control (R2R)," Proc. SEMATECH AEC/APC Symposium XIV, Sept. 2002.