Single-machine scheduling with advanced process control constraints

Journal of Scheduling

Volumn 15, Issue 2, 2012, Pages 165-179

  Cai, Yiwei ^a   Kutanoglu, Erhan ^b   Hasenbein, John ^b   Qin, Joe ^c  

^a FREESCALE SEMICONDUCTOR INC   (United States)

^b The University of Texas at Austin   (United States)

^c University of Southern California   (United States)

Author keywords

Advanced process control; Setups; Single machine scheduling

Indexed keywords

ADVANCED PROCESS CONTROL; HIGH QUALITY; HIGH TECHNOLOGY; MACHINE PARAMETERS; MAKESPAN; MANUFACTURING COMPANIES; NP-HARD; OPTIMAL SOLUTIONS; PRODUCT QUALITY; PRODUCTION COST; SEMICONDUCTOR MANUFACTURING; SETUPS; SINGLE-MACHINE SCHEDULING;

HEURISTIC ALGORITHMS; INTEGER PROGRAMMING; MACHINERY; OPTIMAL SYSTEMS; SCHEDULING; SCHEDULING ALGORITHMS; SEMICONDUCTOR DEVICE MANUFACTURE;

INTELLIGENT CONTROL;

EID: 84861234351     PISSN: 10946136     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10951-010-0215-8     Document Type: Article

References (16)

1. Good, R. P., & Qin, S. J. (2006). On the stability of MIMO EWMA run-to-run controllers with metrology delay. IEEE Transactions on Semiconductor Manufacturing, 9(1), 78-86.
2. Harrison, C. A., Good, R. P., Kadosh, D., & Qin, S. J. (2004). A multistep supervisory control strategy for semiconductor device manufacturing. In 43rd IEEE conference on decision and control.
3. Hung, Y. F., & Leachman, R. C. (1996). A production planning methodology for semiconductor manufacturing based on iterative simulation and linear programming calculations. IEEE Transactions on Semiconductor Manufacturing, 9(2), 257-269.
4. Kim, Y. D., Joo, B. J., & Choi, S. Y. (2010). Scheduling wafer lots on diffusion machines in a semiconductor wafer fabrication facility. IEEE Transactions on Semiconductor Manufacturing, 23(2), 246-254.
5. Lee, Y. H., & Kim, T. (2002). Manufacturing cycle time reduction using balance control in the semiconductor fabrication line. Production Planning & Control, 13, 529-540.
6. Monma, C. L., & Potts, C. N. (1989). On the complexity of scheduling with batch setup times. Operations Research, 37(5), 798-804.
7. Pasadyn, A. J., & Edgar, T. F. (2005). Observability and state estimation for multiple product control in semiconductor manufacturing. IEEE Transactions on Semiconductor Manufacturing, 18(4), 392-604.
8. Qin, S. J., Scheid, G. W., & Riley, T. J. (2003). Adaptive run-to-run control and monitoring for a rapid thermal processor. Journal of Vacuum Science & Technology B, 21(1), 301-310.
9. Qin, S. J., Cherry, G., Good, R. P., Wang, J., & Harrison, C. A. (2006). Semiconductor manufacturing process control and monitoring: A fab-wide framework. Journal of Process Control, 16, 179-191.
10. Sha, D. Y., Hsu, S. Y., Che, Z. H., & Chen, C. H. (2006). A dispatching rule for photolithography scheduling with an on-line rework strategy. Computers and Industrial Engineering, 50(3), 233-247.
11. Uzsoy, R., & Velásquez, J. D. (2008). Heuristics for minimizing maximum lateness on a single machine with family-dependent set-up times. Computers and Operations Research, 35(6), 2018-2033.
12. Webster, S., & Baker, K. R. (1995). Scheduling groups of jobs on a single machine. Operations Research, 43(4), 692-703.
13. Xpress-Mosel user guide. Englewood Cliffs: Dash Optimization Ltd. (2004).
14. Yang, W., & Liao, C. (1999). Survey of scheduling research involving setup times. International Journal of Systems Science, 30(2), 143-155.
15. Yuan, J. J., Liu, Z. H., Ng, C. T., & Cheng, T. C. E. (2006). Single machine batch scheduling problem with family setup times and release dates to minimize makespan. Journal of Scheduling, 9, 499-513.
16. Zdrzalka, S. (1996). A sequencing problem with family setup times. Discrete Applied Mathematics, 66, 161-183.