Development of a generic virtual metrology framework

Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007

Volumn , Issue , 2007, Pages 282-287

  Huang, Hsien Cheng ^a,b   Su, Yu Chuan ^a,c   Cheng, Fan Tien ^a,b   Jian, Jia Mau ^b  

^a IEEE

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c FAR EAST UNIVERSITY   (Taiwan)

Author keywords

Generic Virtual Metrology (GVM) framework; Global Similarity Index (GSI); Phase I virtual metrology value (VMI); Phase II virtual metrology value (VMII); Reliance Index (RI)

Indexed keywords

DATA PROCESSING; FUNCTION EVALUATION; INFORMATION ANALYSIS; SUSTAINABLE DEVELOPMENT;

GENERIC VIRTUAL METROLOGY (GVM) FRAMEWORK; GLOBAL SIMILARITY INDEX (GSI); RELIANCE INDEX (RI);

PROCESS CONTROL;

EID: 38949180899     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COASE.2007.4341746     Document Type: Conference Paper

References (12)

1. 2003 International Technology Roadmap for Semiconductors (ITRS), December 2003. Available: http://public.itrs.net/
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3. P.-H. Chen, S. Wu, J.-S. Lin, F. Ko, H. Lo, J. Wang, C.-H. Yu, and M.-S. Liang, "Virtual Metrology: a Solution for Wafer to Wafer Advanced Process Control," in Proc. 2005 IEEE International Symposium on Semiconductor Manufacturing, San Jose, CA ,USA, pp.155-157, Sept. 2005.
4. Y.-C. Su, M.-H. Hung, F.-T. Cheng, and Y.-T. Chen, "A Processing Quality Prognostics Scheme for Plasma Sputtering in TFT-LCD Manufacturing," IEEE Transactions on Semiconductor Manufacturing, vol. 19, no. 2, pp. 183-194, May 2006.
5. Y.-C. Su, F.-T. Cheng, M.-H. Hung, and H.-C. Huang, "Intelligent Prognostics System Design and Implementation," IEEE Transactions on Semiconductor Manufacturing, vol. 19, no. 2, pp. 195-207, May 2006.
6. Y.-J. Chang, Y. Kang, C.-L. Hsu, C.-T. Chang, and T. Y. Chan, "Virtual Metrology Technique for Semiconductor Manufacturing," in Proc. 2006 International Joint Conference on Neural Networks (IJCNN'06), pp. 5289-5293, July 2006.
7. M.-H. Hung, T.-H. Lin, F.-T. Cheng, and R.-C. Lin, "A Novel Virtual Metrology Scheme for Predicting CVD Thickness in Semiconductor Manufacturing," to appear in IEEE/ASME Transactions on Mechatronics, vol. 12, no. 3, June 2007.
8. F.-T. Cheng, H.-C. Huang, and C.-A. Kao, "Developing a Dual-Phase Virtual Metrology Scheme," submitted to 2007 IEEE International Conference on Automation Science and Engineering, Scottsdale, Arizona, U.S.A., September 2007.
9. F.-T. Cheng, Y.-T. Chen, Y.-C. Su, and D.-L. Zeng, "Method for Evaluating Reliance Level of a Virtual Metrology System," in Proc. 2007 IEEE International Conference on Robotics and Automation, Roma, Italy, pp. 1590-1596, April 2007.
10. Y.-T. Huang, F.-T. Cheng, and Y.-T. Chen, "Importance of Data Quality in Virtual Metrology," in Proc. of The 32th Annual Conference of the IEEE Industrial Electronics Society (IECON 2006), Paris, France, pp. 3727-3732, November 2006.
11. F.-T. Cheng, C.-F. Chang, and S.-L. Wu, "Development of Holonic Manufacturing Execution Systems," Journal of Intelligent Manufacturing, vol. 15, no. 2, pp. 253-267, April 2004.
12. F.-T. Cheng, H.-C. Yang, and J.-Y. Lin, "Development of Holonic Information Coordination Systems with Failure-Recovery Considerations," IEEE Transactions on Automation Science and Engineering, vol. 1, no. 2, pp. 58-72, July 2004.