APC in the semiconductor industry, history and near term prognosis

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1996, Pages 364-369

  Barna, Gabriel G ^a  

^a Texas Veterinary Medical Diagnostic Laboratory   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ERROR DETECTION; INDUSTRY; MODELS; PLASMA ETCHING; PROCESS CONTROL;

MODEL BASED PROCESS CONTROL; SEMICONDUCTOR INDUSTRY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030387659     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)