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Volumn , Issue , 2012, Pages 74-79

Sampling Decision System in semiconductor manufacturing using Virtual Metrology

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL CHARTS; DECISION MODELS; DECISION SYSTEMS; EXPECTED VALUES; MEASUREMENT INFORMATION; MONTE CARLO; OPTIMAL SAMPLING; OPTIMAL STRATEGIES; REAL MEASUREMENTS; REAL METROLOGY; SAMPLING DESIGN; SEMICONDUCTOR INDUSTRY; SEMICONDUCTOR MANUFACTURING; VIRTUAL MEASUREMENTS; VIRTUAL METROLOGY; WAFER MEASUREMENTS; WAFER QUALITY; WISHART MODEL;

EID: 84872504321     PISSN: 21618070     EISSN: 21618089     Source Type: Conference Proceeding    
DOI: 10.1109/CoASE.2012.6386366     Document Type: Conference Paper
Times cited : (7)

References (13)
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    • A. F. M John Wiley and Sons Ltd., Chichester
    • J. M. Bernardo, A. F. M. Smith: Bayesian Theory. John Wiley and Sons Ltd., Chichester (2000).
    • (2000) Smith: Bayesian Theory
    • Bernardo, J.M.1
  • 8
    • 85012688561 scopus 로고
    • Princeton University Press, Princeton, NJ
    • R. Bellman: Dynamic Programming. Princeton University Press, Princeton, NJ (1957).
    • (1957) Dynamic Programming
    • Bellman, R.1
  • 12
    • 0001249987 scopus 로고
    • On the measure of the information provided by an experiment
    • D. V. Lindley: On the Measure of the Information Provided by an Experiment. In: Annals of Mathematical Statistics, Vol. 27, No. 4 (1956), pp. 986-1005.
    • (1956) Annals of Mathematical Statistics , vol.27 , Issue.4 , pp. 986-1005
    • Lindley, D.V.1
  • 13
    • 21144471428 scopus 로고
    • Hsu: Bayesian inference for a covariance matrix
    • J. S. J
    • T. Leonard, J. S. J. Hsu: Bayesian Inference for a Covariance Matrix. In: The Annals of Statistics, Vol. 20, No.4 (1992), pp. 1669-1696.
    • (1992) The Annals of Statistics , vol.20 , Issue.4 , pp. 1669-1696
    • Leonard, T.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.