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Volumn , Issue , 2012, Pages 74-79
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Sampling Decision System in semiconductor manufacturing using Virtual Metrology
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Author keywords
[No Author keywords available]
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Indexed keywords
CONTROL CHARTS;
DECISION MODELS;
DECISION SYSTEMS;
EXPECTED VALUES;
MEASUREMENT INFORMATION;
MONTE CARLO;
OPTIMAL SAMPLING;
OPTIMAL STRATEGIES;
REAL MEASUREMENTS;
REAL METROLOGY;
SAMPLING DESIGN;
SEMICONDUCTOR INDUSTRY;
SEMICONDUCTOR MANUFACTURING;
VIRTUAL MEASUREMENTS;
VIRTUAL METROLOGY;
WAFER MEASUREMENTS;
WAFER QUALITY;
WISHART MODEL;
SEMICONDUCTOR DEVICE MANUFACTURE;
SUSTAINABLE DEVELOPMENT;
UNCERTAINTY ANALYSIS;
UNITS OF MEASUREMENT;
MEASUREMENTS;
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EID: 84872504321
PISSN: 21618070
EISSN: 21618089
Source Type: Conference Proceeding
DOI: 10.1109/CoASE.2012.6386366 Document Type: Conference Paper |
Times cited : (7)
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References (13)
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