Dual-phase virtual metrology scheme

IEEE Transactions on Semiconductor Manufacturing

Volumn 20, Issue 4, 2007, Pages 566-571

  Cheng, Fan Tien ^a   Huang, Hsien Cheng ^a   Kao, Chi An ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED PROCESS CONTROLS; DEPOSITION EQUIPMENTS; GLOBAL SIMILARITIES; ILLUSTRATIVE EXAMPLES; PHASE I; PHASE II; PROCESS DATUM; SEMICONDUCTOR INDUSTRIES; TFT LCDS; THIN-FILM TRANSISTOR LIQUID CRYSTAL DISPLAYS; VIRTUAL METROLOGIES; WORK PIECES;

CHEMICAL EQUIPMENT; ELECTRIC CONDUCTIVITY; GLASS; INTELLIGENT CONTROL; LIGHT SOURCES; LIQUID CRYSTAL DISPLAYS; LIQUID CRYSTALS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR MATERIALS; THIN FILM TRANSISTORS;

MEASUREMENTS;

EID: 38949143586     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2007.907633     Document Type: Article

References (10)

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