Automated visual inspection in the semiconductor industry: A survey

Computers in Industry

Volumn 66, Issue , 2015, Pages 1-10

  Huang, Szu Hao ^a   Pan, Ying Cheng ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Automated visual inspection; LED; Semiconductor industry; TFT LCD; Wafer

Indexed keywords

AUTOMATION; COMPUTATIONAL EFFICIENCY; INSPECTION; LIGHT EMITTING DIODES; LIQUID CRYSTAL DISPLAYS; OPTICAL DATA PROCESSING; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DIODES; SILICON WAFERS; THIN FILM TRANSISTORS;

AUTOMATED VISUAL INSPECTION; IMAGE PROCESSING TECHNIQUE; SEMICONDUCTOR INDUSTRY; TFT-LCDS; THIN FILM TRANSISTOR LIQUID CRYSTAL DISPLAYS; VISION BASED ALGORITHMS; VISUAL INSPECTION SYSTEMS; WAFER;

COMPUTER VISION;

EID: 84915731798     PISSN: 01663615     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.compind.2014.10.006     Document Type: Review

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